Digital Microscope Keyence VHX7000
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Description
The Keyence VHX Series 4K Digital Microscope uses high-resolution 4K imaging and advanced analysis software for high-magnification imaging, 2D/3D measurements, and more. The VHX Series has a depth of field that is 20 times greater than conventional optical microscopes. 2D and 3D measurements for roughness, contamination, grain size, and other measurements can be performed. The digital images can be saved in their original form or with measurements applied.
Objectives Available
- Low Magnification Lens = 20-100x
- Medium Magnification Lens = 100-500x
- High Magnification Lens = 500-2500x
- Highest Magnification Lens = 2500-6000x
Resources
Manufacturer Specifications
- Whole wafers 2” up to 6” can be loaded.
- Samples pieces up to 6”x6” square can be loaded.
- Samples up to 6mm thick can be loaded..
- Exposure Resolution:
- Soft Contact Mode = 1 - 2 um
- Hard Contact Mode = 1 um
- Soft Vacuum Contact Mode = 1 - 0.5 um
- Vacuum Contact Mode = 0.4 - 0.5 um
Suss 1 Exposure Settings
- Channel 1 is 365nm wavelength at 15 mW/cm2.
- Channel 2 is 405nm wavelength at 25 mW/cm2.
Suss 2 Exposure Settings
- Channel 1 is 365nm wavelength at 10 mW/cm2.
- Channel 2 is 405nm wavelength at 15 mW/cm2.
SOPs & Troubleshooting
- General SOP & Troubleshooting
- Lamp Change SOP
- Lamp Re-Ignition SOP
- Suss 1 Lamp Re-Ignition Video
- Suss 2 Lamp Re-Ignition Video
Manufacturer Manuals
- Suss MA6/BA6 System Manual
- Suss MA6/BA6 Brochure
- Lamp Power Supply Manual
- Alignment Mark Suggestion Document
Labrunr Reservation Rules:
| Advanced Res (days) | Limit per Res (hrs) | Limit per week (hrs) | |
|---|---|---|---|
| Weekday | 7 | 4 | 12 |
| Weeknight | 7 | 6 | 18 |
| Weekend | 14 | 6 | 18 |
For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling. Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.
Equipment Status
- LabRunr Equipment Status (Select Suss1 or Suss2 from the dropdown menu)
Optical Lithography Resources
- Optical Lithography Resources Page
- Laurell Spinner Cleaning SOP
- Laurell Spinner - Spinning Resist Video
Process Recipes