Parylene Coater

Para Tech LabTop 3000 Parylene Coater Instrument Type Deposition Techniques Parylene deposition Staff Manager Alex Wertheim Staff Email alexw@caltech.edu Staff Phone 626-395-3371 Reserve time on FBS Request training via FBS User Dashboard Lab Location Lab Phone 626-395-1539 Manufacturer Para Tech Model {{{Model}}}

Description

The ParaTech LabTop 3000 Parylene coater uses a multi-stage thermal process to deposit a conformal parylene film on your substrates. Multiple wafers up to 150mm diameter may be coated at once. Samples are under vacuum during and not subject to heat during coating.

Applications

• Bio-compatible/moisture protection packaging.
• Dielectric polymer coating

Resources

SOPs

• KNI SOP