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| == Resources == | | == Resources == |
| === Manufacturer Specifications ===
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| * Whole wafers 2” up to 6” can be loaded.
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| * Samples pieces up to 6”x6” square can be loaded.
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| * Samples up to 6mm thick can be loaded..
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| * Exposure Resolution:
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| ::Soft Contact Mode = 1 - 2 um
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| ::Hard Contact Mode = 1 um
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| ::Soft Vacuum Contact Mode = 1 - 0.5 um
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| ::Vacuum Contact Mode = 0.4 - 0.5 um
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| ''' Suss 1 Exposure Settings '''
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| * Channel 1 is 365nm wavelength at 15 mW/cm2.
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| * Channel 2 is 405nm wavelength at 25 mW/cm2.
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| ''' Suss 2 Exposure Settings '''
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| * Channel 1 is 365nm wavelength at 10 mW/cm2.
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| * Channel 2 is 405nm wavelength at 15 mW/cm2.
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| === SOPs & Troubleshooting === | | === SOPs & Troubleshooting === |
| * [https://caltech.box.com/s/gkhncvqe25uccym7cs5aj0n00krbmnw1 General SOP & Troubleshooting] | | * coming soon |
| * [https://caltech.box.com/s/bbk4f9vi6jerhi9fcqoqa78n5npkwxkr Lamp Change SOP]
| | === Manufacturer Manuals === |
| * [https://caltech.box.com/s/mj01k4mxgsxbnctv3fayzaje1ph4bfop Lamp Re-Ignition SOP]
| | * coming soon |
| * [https://caltech.box.com/s/xq40xbslhezrn4dyrblsgxrojd21lb8g Suss 1 Lamp Re-Ignition Video]
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| * [https://caltech.box.com/s/f5f4z86p8v9i43nvs7ntbgkzrog44jpm Suss 2 Lamp Re-Ignition Video]
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| Manufacturer Manuals
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| * [https://caltech.box.com/s/81h0w7viflquujpc960x76os52oinv1f Suss MA6/BA6 System Manual]
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| * [https://caltech.box.com/s/0bdk31f09vxui62c096lhaiguzgkc1cu Suss MA6/BA6 Brochure]
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| * [https://caltech.box.com/s/fxyqt4fkpb6x1c0li2l84wjose5x0wke Lamp Power Supply Manual]
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| * [https://caltech.box.com/s/e1b5co1cb4hwbu21ala3cnqt888tma7f Alignment Mark Suggestion Document]
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| | |
| ==== Labrunr Reservation Rules:==== | |
| {| class="wikitable"
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| |-
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| ! !! Advanced Res (days) !! Limit per Res (hrs) !! Limit per week (hrs)
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| |-
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| | Weekday || 7 || 4 || 12
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| |-
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| | Weeknight || 7 || 6 || 18
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| |-
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| | Weekend || 14 || 6 || 18
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| |}
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| ''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
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| '' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''
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| ===== Equipment Status =====
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| * [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Suss1 or Suss2 from the dropdown menu) | |
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| === Optical Lithography Resources ===
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| * [[Optical Lithography Resources | Optical Lithography Resources Page]]
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| * [https://caltech.box.com/s/jsetuvrq4ec1alqvn25pz11kmtzuw8rc Laurell Spinner Cleaning SOP]
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| * [https://caltech.box.com/s/evjv6kciuamgl42moa8vug60dpc0gimp Laurell Spinner - Spinning Resist Video]
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| === Process Recipes ===
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| * [https://lab.kni.caltech.edu/index.php/Process_Recipe_Library#Optical_Lithography Optical Lithography Photoresist Recipes]
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| == Related Instrumentation in the KNI == | | == Related Instrumentation in the KNI == |
