Dektak 3ST: Profilometer: Difference between revisions
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|Techniques = Surface Profiling | |Techniques = Surface Profiling | ||
|RequestTraining = alexw@caltech.edu | |RequestTraining = alexw@caltech.edu | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
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Revision as of 21:54, 20 February 2020
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Description
The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.
Applications
- Surface Profiling
Resources
SOPs