Dektak 3ST: Profilometer: Difference between revisions
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|RoomLocation = B235 Steele | |RoomLocation = B235 Steele | ||
|LabPhone = 626-395-1539 | |LabPhone = 626-395-1539 | ||
|PrimaryStaff = [[ | |PrimaryStaff = [[Alireza Ghaffari]] | ||
|StaffEmail = | |StaffEmail = alireza@caltech.edu | ||
|StaffPhone = 626-395- | |StaffPhone = 626-395-3984 | ||
|Manufacturer = Veeco | |Manufacturer = Veeco | ||
|Model = Dektak 3ST | |Model = Dektak 3ST | ||
|Techniques = Surface Profiling | |Techniques = Surface Profiling | ||
|RequestTraining = | |RequestTraining = alireza@caltech.edu | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
}} | }} | ||
Revision as of 21:04, 12 May 2023
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Description
The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.
Applications
- Surface Profiling
Resources
SOPs