Wet Chemistry

Wet Chemistry Instrument Type Wet Chemistry Techniques Wet Chemical Processing: Acids, Bases, Solvents, and Electroplating Staff Manager Bert Mendoza Staff Email bertm@caltech.edu Staff Phone 626-395-4075 Reserve time on LabRunr Request training by email Lab Location B211 Steele Lab Phone 626-395-1538 Manufacturer NA Model NA

Facilities

Wet Benches in the Wet Chemistry Room:

• ACID BENCH: Personal Protective Equipment required to be worn.
  • Okay to store acid resistant gloves on top
• BASE/CAUSTIC BENCH: Personal Protective Equipment required to be worn.
  • Okay to store acid resistant gloves on top
• ELECTROPLATING BENCH: Personal Protective Equipment required to be worn.
• HF ACID BENCH (Hydrofluoric Acid): Personal Protective Equipment required to be worn.
  • Okay to store acid resistant gloves on top
• KOH BENCH (Potassium Hydroxide): Personal Protective Equipment required to be worn.
• SOLVENTS BENCH: Double Nitrile Gloves and Safety Glasses required to be worn.

------> Note: Personal Protective Equipment or "PPE" consists of:

• 1) Acid Resistant Apron (Green) - PUT ON FIRST, Remove Last
• 2) Face Shield (WITH SAFETY GLASSES) - PUT ON SECOND, Remove Second
• 3) Trionic E-194 Tripoly Acid Resistant Gloves - PUT ON LAST, Remove First

Write NAME and DATE on both Trionic gloves when opening package. Acid gloves typically last 2 weeks. INSPECT BEFORE EACH USE.

Wet Bench in the Optical Lithography Room:

• DEVELOP BENCH (base/caustic): Double Nitrile Gloves and Safety Glasses required to be worn.
  • Solvent Develop (SU8 developer) must be performed on the SOLVENT BENCH in the Wet Chemistry Room.

Fumed Hoods inside the Optical Lithography Room:

• SPINNER BENCH (solvent hood): Laurell 1 (SU8 only), Laurell 2 (Positive,nLOF SPR), and Headway Spinner (Large Substrates and special Coatings)
• HOT PLATE BENCH (solvent hood): Torrey Pines Scientific hot plate(programable up to 350C), Two - Fairweather TPS88 hot plates(Non-Programable up to 150C) Solvent Hood.

Wet Bench in the E-beam Lithography Area:

• DEVELOP and SPINNER BENCH (solvent bench): Double Nitrile Gloves and Safety Glasses required to be worn.

Hazardous Waste Storage:

• AUTOMATIC BOTTLE WASHER: Located inside the Wet Chemistry Room
• SATELLITE ACCUMULATION AREA: Located in the Oxford Chase next to the Water Chiller.
  • STORAGE CART for storage of TAGGED full waste bottles.
  • STORAGE BIN (next to the cart) is for "DOUBLE BAGGED AND TAGGED" waste which can also be used for TAGGED containers that do not fit inside the cart.

Chemistry Procedures and Safety

• Wet Chemistry Safety Procedures - Requesting new chemical, PPE Overview, Hazardous Waste Handling and Labeling, Decanting Chemicals, Hot Plate Rules, Buddy System, Secondary Containment and Other Best Practices.
• Wet Chemistry Resources Page - Contains fabrication recipes and procedures
• Lab Rules & Safety - KNI cleanroom safety handbook

Chemical Safety Data Sheet Lists

• Chemicals Provided by the KNI with typical SDS
• Approved Chemicals Allowed to be used in the KNI with typical SDS (chemical not provided by the KNI)
• Search for Safety Data Sheets (SDS) - New Chemical Search (Web Search)

Requesting New Chemicals

NEVER bring in any chemicals into the KNI Lab before receiving an approval through email that your chemical has been allowed to be used inside the lab.

• Always thoroughly review the SAFETY DATA SHEET of the new chemical being requested BEFORE submitting a request.
• Submit the request through email to the KNI Lab Safety Officer - Bert Mendoza
• Email should include:
  • (1) SAFETY DATA SHEET (attached) from manufacture.
  • (2) PROCESS DESCRIPTION - a detailed description of the process and how the chemical will be used.
  • (3) AMOUNT OR QUANTITY of chemical to be brought into the KNI Lab.
• The KNI Lab provides many chemicals for processing. If the requested chemical will improve your process and can be valuable to other members, include the reasons in the request. Staff may decide it would be beneficial to provide the new chemical for all members and add it to the Chemicals Provided by the KNI with typical SDS list.
• If the chemical is unique to your process, you will be required to supply the chemical and the chemical will be added to the Approved Chemicals with typical SDS list.