Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF

Tecnai TF-30 Instrument Type Microscopy Techniques TEM, STEM, Bright & Dark Field Imaging, EDS, HAADF, Electron Diffraction, Tomography Staff Manager Matthew S. Hunt, PhD Staff Email matthew.hunt@caltech.edu Staff Phone 626-395-5994 Reserve time on LabRunr Request training by email Lab Location B242F Keck Lab Phone 626-395-8908 Manufacturer FEI (now Thermo Fisher) Model {{{Model}}}

Description

The Tecnai TF-30 is a transmission electron microscope (TEM) that can also be operated in scanning transmission electron microscopy (STEM) mode, with a voltage range of 80 to 300 kV. Operation at 300 kV makes this the KNI's highest resolution TEM (see also the 200 kV Tecnai TF-20). The TF-30 is also equipped with a high-angle annular dark field (HAADF) detector for use in STEM mode, and an energy dispersive spectroscopy (EDS) detector for compositional analysis (in both TEM mode and, most usually, in STEM mode). The Serial EM program allows for automated collection of images at variable tilt angles for performing tomography. See a full list of training and educational resources for this instrument below.

Applications

• High-Resolution TEM (HRTEM) imaging without an objective aperture
• Bright Field (BF) & Dark Field (DF) imaging with an objective aperture
• Selected Area Electron Diffraction (SAED)
• STEM imaging with a High-Angle Annular Dark Field (HAADF) detector
• Energy Dispersive Spectroscopy (EDS) with Oxford INCA system
• Automatically capture tilt series of images for tomographic imaging

Resources

SOPs & Troubleshooting

• SEM SOPs (Short Version | Long Version)
• Ga-FIB SOPs (Short Version | Long Version)
• TEM Lamella Sample Preparation SOPs (Short Version | Long Version)
• Cutting & Imaging Cross-Sections SOP
• Troubleshooting Guide

Video Tutorials

• Getting Started | Basic SEM Alignment
• Astigmatism Correction (Details | On Right-Angle Features | Stigmator Alignment)
• Eucentric Height: What it means, When to use it & How to get there
• TEM Lamella Sample Prep (Playlist)
• Cutting & Imaging Cross-sections (Playlist)
• Milling Non-Conductive Samples using Charge Compensation
• Perfecting Ga-FIB Alignments
• Adjusting TLD Voltage to Capture SE vs. BSE Signal

Graphical Handouts

• SEM Concepts
• Ga-FIB Concepts
• SEM & Ga-FIB Alignments
• Guide to Optimizing SEM Imaging

Presentations

• Scanning Electron Microscopy: Principles, Techniques & Applications
• Gallium Focused Ion Beam Microscopy: Principles, Techniques & Applications

Manufacturer Manuals

• Nova NanoLab Operation Manual
• Gas Injection Systems – Deposition of Platinum (Technical Note)
• Gas Injection Systems – Deposition of SiOx (Technical Note)
• Gas Injection Systems – Etching with IEE aka XeF2 Etch (Technical Note)
• Gas Injection Systems – Beam Chemistries Presentation
• Scripting – AutoScript Language Manual (year 2000 Technical Note: most complete)
• Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)
• Scripting – RunScript Manual

Simulation Software

• CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions
• The Stopping & Range of Ions in Matter (SRIM) – simulate i-beam/specimen interactions

Order Your Own Stubs

• Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each SEM, yet you should buy your own so that you can keep them clean and available to you. There are many stub geometries and configurations, some of which will be right for you to purchase and keep with your other cleanroom items.
  • Buy stubs with copper clips (recommended for most devices, esp with non-conductive substrates);
  • Buy stubs without copper clips (ok for devices with conductive substrates)

Specifications

Manufacturer Specifications

• Nova 600 NanoLab Data Sheet (not all parameters apply to our instrument, see below for details specific to the KNI's Nova 600)

SEM Specifications

• 0.5 to 30.0 kV
• Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
• etc.

Ga-FIB Specifications

• 5.0 to 30.0 kV
• 10 pA - 20 nA
• etc.