Spectroscopic Ellipsometer

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M-2000 Spectroscopic Ellipsometer
M-2000-Ellipsometer.jpg
Instrument Type Optical Characterization,
Metrology
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
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Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications
  • Thickness measurement
  • Optical & electronic property analysis
  • Surface roughness measurement
  • Materials identification

Resources

SOP
Video Tutorials

Specifications

Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral Range: 370-1000 nm
  • Motorized stage enables automated mapping scans across up to 100 mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2 mm spot size
    • Removable beam focusing probes can reduce spot size to 300 μm