Difference between revisions of "Spectroscopic Ellipsometer"
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|Model = M-2000 | |Model = M-2000 | ||
|Techniques = Ellipsometry | |Techniques = Ellipsometry | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
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** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers] | ** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers] | ||
** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline] | ** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline] | ||
** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators] | |||
** [https://youtu.be/EY7wKNnstMw Part 5: Thickness Measurement of Metals] | |||
== Specifications == | == Specifications == | ||
Latest revision as of 23:48, 30 March 2020
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Description
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.
Applications
- Thickness measurement
- Optical & electronic property analysis
- Surface roughness measurement
- Materials identification
Resources
SOP
Video Tutorials
- Ellipsometry & CompleteEASE:
Specifications
Hardware Specifications
- CompleteEASE measurement and analysis software
- Spectral Range: 370-1000 nm
- Motorized stage enables automated mapping scans across up to 100 mm wafers
- Automatic measurement angle control
- Automatic sample alignment
- 2 mm spot size
- Removable beam focusing probes can reduce spot size to 300 μm