Difference between revisions of "Spectroscopic Ellipsometer"

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|Model = M-2000
|Model = M-2000
|Techniques = Ellipsometry
|Techniques = Ellipsometry
|EmailList = kni-metrology@caltech.edu
|EmailList = kni-metrology
|EmailListName =  Metrology
|EmailListName =  Metrology
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** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]
** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]
** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]
** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]
** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators]
** [https://youtu.be/EY7wKNnstMw Part 5: Thickness Measurement of Metals]

== Specifications ==
== Specifications ==

Latest revision as of 23:48, 30 March 2020

M-2000 Spectroscopic Ellipsometer
Instrument Type Optical Characterization,
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000


The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

  • Thickness measurement
  • Optical & electronic property analysis
  • Surface roughness measurement
  • Materials identification


Video Tutorials


Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral Range: 370-1000 nm
  • Motorized stage enables automated mapping scans across up to 100 mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2 mm spot size
    • Removable beam focusing probes can reduce spot size to 300 μm