Spectroscopic Ellipsometer: Difference between revisions
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|ImageOne = M-2000-Ellipsometer.jpg | |ImageOne = M-2000-Ellipsometer.jpg | ||
|ImageTwo = M-2000-Ellipsometer.jpg | |ImageTwo = M-2000-Ellipsometer.jpg | ||
|InstrumentType = [[Equipment_List#Optical Characterization|Optical Characterization]] | |InstrumentType = [[Equipment_List#Optical Characterization|Optical Characterization]],<br>[[Equipment_List#Metrology|Metrology]] | ||
|RoomLocation = | |RoomLocation = B235 Steele | ||
|LabPhone = 626-395-1539 | |LabPhone = 626-395-1539 | ||
|PrimaryStaff = [[Alex Wertheim]] | |PrimaryStaff = [[Alex Wertheim]] | ||
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|Model = M-2000 | |Model = M-2000 | ||
|Techniques = Ellipsometry | |Techniques = Ellipsometry | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
}} | }} | ||
== Description == | == Description == | ||
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 | The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability. | ||
===== Applications ===== | ===== Applications ===== | ||
* Thickness measurement | * Thickness measurement | ||
* Optical | * Optical & electronic property analysis | ||
* Surface roughness measurement | * Surface roughness measurement | ||
* Materials identification | * Materials identification | ||
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===== SOP ===== | ===== SOP ===== | ||
* [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP] | * [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP] | ||
===== Video Tutorials ===== | ===== Video Tutorials ===== | ||
* Ellipsometry & CompleteEASE: | * Ellipsometry & CompleteEASE: | ||
** [https://youtu.be/M4jGUP-883U | ** [https://youtu.be/M4jGUP-883U Part 1: Fitting basics for transparent films] | ||
** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers] | |||
** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline] | |||
** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators] | |||
** [https://youtu.be/EY7wKNnstMw Part 5: Thickness Measurement of Metals] | |||
== Specifications == | == Specifications == | ||
===== Hardware Specifications ===== | ===== Hardware Specifications ===== | ||
* CompleteEASE measurement and analysis software | * CompleteEASE measurement and analysis software | ||
* Spectral | * Spectral Range: 370-1000 nm | ||
* Motorized stage enables automated mapping scans across up to | * Motorized stage enables automated mapping scans across up to 100 mm wafers | ||
* Automatic measurement angle control | * Automatic measurement angle control | ||
* Automatic sample alignment | * Automatic sample alignment | ||
* | * 2 mm spot size | ||
** Removable beam focusing probes reduce spot size to | ** Removable beam focusing probes can reduce spot size to 300 μm | ||
Latest revision as of 23:48, 30 March 2020
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Description
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.
Applications
- Thickness measurement
- Optical & electronic property analysis
- Surface roughness measurement
- Materials identification
Resources
SOP
Video Tutorials
- Ellipsometry & CompleteEASE:
Specifications
Hardware Specifications
- CompleteEASE measurement and analysis software
- Spectral Range: 370-1000 nm
- Motorized stage enables automated mapping scans across up to 100 mm wafers
- Automatic measurement angle control
- Automatic sample alignment
- 2 mm spot size
- Removable beam focusing probes can reduce spot size to 300 μm