Difference between revisions of "Spectroscopic Ellipsometer"

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|ImageOne = M-2000-Ellipsometer.jpg
|ImageOne = M-2000-Ellipsometer.jpg
|ImageTwo = M-2000-Ellipsometer.jpg
|ImageTwo = M-2000-Ellipsometer.jpg
|InstrumentType = [[Equipment_List#Optical Characterization|Optical Characterization]]
|InstrumentType = [[Equipment_List#Optical Characterization|Optical Characterization]],<br>[[Equipment_List#Metrology|Metrology]]
|RoomLocation = B123 Steele
|RoomLocation = B235 Steele
|LabPhone = 626-395-1539
|LabPhone = 626-395-1539
|PrimaryStaff = [[Alex Wertheim]]
|PrimaryStaff = [[Alex Wertheim]]
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|Model = M-2000
|Model = M-2000
|Techniques = Ellipsometry
|Techniques = Ellipsometry
|EmailList = kni-metrology@caltech.edu
|EmailList = kni-metrology
|EmailListName =  Metrology
|EmailListName =  Metrology
}}
}}
== Description ==
== Description ==
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' & ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.  
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90&deg;, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.  
 
===== Applications =====
===== Applications =====
* Thickness measurement  
* Thickness measurement  
* Optical/electronic property analysis
* Optical & electronic property analysis
* Surface roughness measurement
* Surface roughness measurement
* Materials identification
* Materials identification
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===== SOP =====
===== SOP =====
* [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP]
* [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP]
===== Video Tutorials =====
===== Video Tutorials =====
* Ellipsometry & CompleteEASE:
* Ellipsometry & CompleteEASE:
** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] | [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers]
** [https://youtu.be/M4jGUP-883U Part 1: Fitting basics for transparent films]  
 
** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]
===== Manufacturer Manuals =====
** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]
* [https://caltech.box.com/s/og4309108q4k2jwhkaxqtpiujg2al5iu Manual 1]
** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators]
* [https://caltech.box.com/s/j0t3w6i53jhfjcva8i4qvlatdh7t1tzw Manual 2]
** [https://youtu.be/EY7wKNnstMw Part 5: Thickness Measurement of Metals]


== Specifications ==
== Specifications ==
===== Hardware Specifications =====
===== Hardware Specifications =====
* CompleteEASE measurement and analysis software
* CompleteEASE measurement and analysis software
* Spectral range: 370-1000nm
* Spectral Range: 370-1000 nm
* Motorized stage enables automated mapping scans across up to 100mm wafers
* Motorized stage enables automated mapping scans across up to 100 mm wafers
* Automatic measurement angle control
* Automatic measurement angle control
* Automatic sample alignment
* Automatic sample alignment
* 2mm spot size
* 2 mm spot size
** Removable beam focusing probes reduce spot size to 300um
** Removable beam focusing probes can reduce spot size to 300 &mu;m

Latest revision as of 23:48, 30 March 2020

M-2000 Spectroscopic Ellipsometer
M-2000-Ellipsometer.jpg
Instrument Type Optical Characterization,
Metrology
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications
  • Thickness measurement
  • Optical & electronic property analysis
  • Surface roughness measurement
  • Materials identification

Resources

SOP
Video Tutorials

Specifications

Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral Range: 370-1000 nm
  • Motorized stage enables automated mapping scans across up to 100 mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2 mm spot size
    • Removable beam focusing probes can reduce spot size to 300 μm