Spectroscopic Ellipsometer

M-2000 Spectroscopic Ellipsometer Instrument Type Optical Characterization Techniques Ellipsometry Staff Manager Alex Wertheim Staff Email alexw@caltech.edu Staff Phone 626-395-3371 Reserve time on LabRunr Request training by email Lab Location B123 Steele Lab Phone 626-395-1539 Manufacturer J.A. Woolam Company Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications

• Thickness measurement
• Optical/electronic property analysis
• Surface roughness measurement
• Materials identification

Resources

SOP

• KNI SOP

Video Tutorials

• Ellipsometry & CompleteEASE:
  • Part1: Fitting basics for transparent films | Part2: Transparent polymers | Part3: Absorbing Films via B-Spline

Specifications

Hardware Specifications

• CompleteEASE measurement and analysis software
• Spectral range: 370-1000nm
• Motorized stage enables automated mapping scans across up to 100mm wafers
• Automatic measurement angle control
• Automatic sample alignment
• 2mm spot size
  • Removable beam focusing probes reduce spot size to 300um