Difference between revisions of "Spectroscopic Ellipsometer"

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===== Video Tutorials =====
===== Video Tutorials =====
* Ellipsometry & CompleteEASE:
* Ellipsometry & CompleteEASE:
** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] | [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers]
** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] | [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers] | [https://youtu.be/l6-uTJ-V3EU Part3: Absorbing Films via B-Spline]


===== Manufacturer Manuals =====
* [https://caltech.box.com/s/og4309108q4k2jwhkaxqtpiujg2al5iu Manual 1]
* [https://caltech.box.com/s/j0t3w6i53jhfjcva8i4qvlatdh7t1tzw Manual 2]


== Specifications ==
== Specifications ==

Revision as of 23:48, 23 May 2019

M-2000 Spectroscopic Ellipsometer
M-2000-Ellipsometer.jpg
Instrument Type Optical Characterization
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B123 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications
  • Thickness measurement
  • Optical/electronic property analysis
  • Surface roughness measurement
  • Materials identification

Resources

SOP
Video Tutorials


Specifications

Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral range: 370-1000nm
  • Motorized stage enables automated mapping scans across up to 100mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2mm spot size
    • Removable beam focusing probes reduce spot size to 300um