Difference between revisions of "Spectroscopic Ellipsometer"

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== Description ==
== Description ==
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' & ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.  
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.  


===== Applications =====
===== Applications =====

Revision as of 00:48, 22 May 2019

M-2000 Spectroscopic Ellipsometer
M-2000-Ellipsometer.jpg
Instrument Type Optical Characterization
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B123 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications
  • Thickness measurement
  • Optical/electronic property analysis
  • Surface roughness measurement
  • Materials identification

Resources

SOP
Video Tutorials
Manufacturer Manuals

Specifications

Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral range: 370-1000nm
  • Motorized stage enables automated mapping scans across up to 100mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2mm spot size
    • Removable beam focusing probes reduce spot size to 300um