Difference between revisions of "Spectroscopic Ellipsometer"

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{{InstrumentInfoboxOneImage|
{{InstrumentInfoboxOneImage|
|InstrumentName = M-2000 Spectroscopic Ellipsometer
|InstrumentName = M-2000 Spectroscopic Ellipsometer
|HeaderColor = #F2682A
|HeaderColor = #F5A81C
|ImageOne = M-2000-Ellipsometer.jpg
|ImageOne = M-2000-Ellipsometer.jpg
|ImageTwo = M-2000-Ellipsometer.jpg
|ImageTwo = M-2000-Ellipsometer.jpg
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|StaffPhone = 626-395-3371
|StaffPhone = 626-395-3371
|Manufacturer = J.A. Woolam Company
|Manufacturer = J.A. Woolam Company
|Model = M-2000
|Techniques = Ellipsometry
|Techniques = Ellipsometry
|EmailList = kni-metrology@caltech.edu
|EmailList = kni-metrology@caltech.edu

Revision as of 00:48, 22 May 2019

M-2000 Spectroscopic Ellipsometer
M-2000-Ellipsometer.jpg
Instrument Type Optical Characterization
Techniques Ellipsometry
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Sign up for Metrology email list
Lab Location B123 Steele
Lab Phone 626-395-1539
Manufacturer J.A. Woolam Company
Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n & k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications
  • Thickness measurement
  • Optical/electronic property analysis
  • Surface roughness measurement
  • Materials identification

Resources

SOP
Video Tutorials
Manufacturer Manuals

Specifications

Hardware Specifications
  • CompleteEASE measurement and analysis software
  • Spectral range: 370-1000nm
  • Motorized stage enables automated mapping scans across up to 100mm wafers
  • Automatic measurement angle control
  • Automatic sample alignment
  • 2mm spot size
    • Removable beam focusing probes reduce spot size to 300um