Difference between revisions of "Process Recipe Library"

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**[https://caltech.box.com/s/59upcnvhlqulnazm51b0dihd942xebn3 All Resources for SAED Evaluation, including DPs captured of standard samples]
**[https://caltech.box.com/s/59upcnvhlqulnazm51b0dihd942xebn3 All Resources for SAED Evaluation, including DPs captured of standard samples]


===== Thermal Processing =====
== Thermal Processing ==
===== Wet Oxidation =====
* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation at 1000C on Tystar Tube Furnaces]
* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation at 1000C on Tystar Tube Furnaces]


== Multi-Technique Fabrication Processes ==
== Multi-Technique Fabrication Processes ==
* [https://caltech.box.com/s/ohm3fp2h3203yxi6j8peo8bf4v1mz0yt Si-W notched nanopillar fabrication]
* [https://caltech.box.com/s/ohm3fp2h3203yxi6j8peo8bf4v1mz0yt Si-W notched nanopillar fabrication]

Revision as of 19:48, 11 March 2020

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Neon Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching
Wet Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)

Thermal Processing

Wet Oxidation

Multi-Technique Fabrication Processes