Difference between revisions of "Process Recipe Library"

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===== Chemical Vapor Deposition (CVD) =====
===== Chemical Vapor Deposition (CVD) =====
* [https://caltech.box.com/s/qnxzioeoudzbnow9aopguf9xkysxsey3 PECVD amorphous Si recipe]
* [https://caltech.box.com/s/qnxzioeoudzbnow9aopguf9xkysxsey3 PECVD amorphous Si recipe]
* [https://caltech.box.com/s/gy10uau7tikhvhakgpjvlzalb7boavbv PECVD 350C SiO2 recipe]


== Etching Process Recipes ==
== Etching Process Recipes ==

Revision as of 22:22, 6 February 2020

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching
Wet Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)

Multi-Technique Fabrication Processes