Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe: Difference between revisions
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* [https://caltech.box.com/s/n0abqy5z1e9a8hbyf38qybxu86sqz3vb Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)] | * [https://caltech.box.com/s/n0abqy5z1e9a8hbyf38qybxu86sqz3vb Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)] | ||
* [https://caltech.box.com/s/tlqgvtkkiahi261megm087i61gqlfzrc Scripting – RunScript Manual] | * [https://caltech.box.com/s/tlqgvtkkiahi261megm087i61gqlfzrc Scripting – RunScript Manual] | ||
===== Simulation Software ===== | |||
* [http://www.gel.usherbrooke.ca/casino/What.html CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions] | |||
* [http://www.srim.org/ The Stopping & Range of Ions in Matter (SRIM) – simulate i-beam/specimen interactions] | |||
===== Order Your Own Stubs ===== | |||
* [https://www.tedpella.com/SEM_html/SEMclip.htm.aspx Buy stubs (with copper clips, recommended) from Ted Pella] | |||
* [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs (without copper clips) from Ted Pella] | |||
= Specifications = | = Specifications = |
Revision as of 21:32, 24 April 2019
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Description
The Nova 600 is a "dual beam" system that combines a scanning electron microscope (SEM) with a gallium focused ion beam (Ga-FIB). It can be used to capture high quality images (with sub-10 nm resolution) and perform site-specific etching and material deposition (with sub-50 nm resolution). It is also equipped with an Omniprobe lift-out system for TEM lamella sample preparation. See a full list of training and educational resources for this instrument below.
SEM Applications
- Ultra-High-Resolution Imaging (Immersion Mode)
- High-Resolution Imaging (Field-Free Mode)
- Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
- Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)
- Platinum deposition via Gas Injection System (GIS)
Ga-FIB Applications
- Directly etch patterns into material
- Cutting & Imaging Cross-Sections
- TEM Lamella Sample Preparation using an Omniprobe for Liftout
- Platinum & SiOx deposition via GIS
- Enhanced etch with XeF2 via GIS
- Automated patterning with RunScript program & AutoScript language
Resources
SOPs & Troubleshooting
- SEM SOPs (Short Version | Long Version)
- Ga-FIB SOPs (Short Version | Long Version)
- TEM Lamella Sample Preparation SOPs (Short Version | Long Version)
- Cutting & Imaging Cross-Sections SOP
- Troubleshooting Guide
Video Tutorials
- Getting Started | Basic SEM Alignment
- Astigmatism Correction (Details | On Right-Angle Features | Stigmator Alignment)
- Eucentric Height: What it means, When to use it & How to get there
- TEM Lamella Sample Prep (Playlist)
- Cutting & Imaging Cross-sections (Playlist)
- Milling Non-Conductive Samples using Charge Compensation
- Perfecting Ga-FIB Alignments
- Adjusting TLD Voltage to Capture SE vs. BSE Signal
Graphical Handouts
Presentations
- Scanning Electron Microscopy: Principles, Techniques & Applications
- Gallium Focused Ion Beam Microscopy: Principles, Techniques & Applications
Manufacturer Manuals
- Nova NanoLab Operation Manual
- Gas Injection Systems – Deposition of Platinum (Technical Note)
- Gas Injection Systems – Deposition of SiOx (Technical Note)
- Gas Injection Systems – Etching with IEE aka XeF2 Etch (Technical Note)
- Gas Injection Systems – Beam Chemistries Presentation
- Scripting – AutoScript Language Manual (year 2000 Technical Note: most complete)
- Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)
- Scripting – RunScript Manual
Simulation Software
- CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions
- The Stopping & Range of Ions in Matter (SRIM) – simulate i-beam/specimen interactions
Order Your Own Stubs
- Buy stubs (with copper clips, recommended) from Ted Pella
- Buy stubs (without copper clips) from Ted Pella
Specifications
Manufacturer Specifications
- Nova 600 NanoLab Data Sheet (not all parameters apply to our instrument, see below for details specific to the KNI's Nova 600)
Scanning Electron Microscope (SEM) Specifications
- 0.5 to 30.0 kV
- Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
- etc.
Gallium Focused Ion Beam (Ga-FIB) Specifications
- 5.0 to 30.0 kV
- 10 pA - 20 nA
- etc.