DWL-66: Direct-Write Laser System: Difference between revisions
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(Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = DWL-66 Direct-Write Laser System |HeaderColor = #FFFFFF |ImageOne = Heidelberg-DWL-66.jpg |ImageTwo = |InstrumentType = Equip...") |
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|StaffPhone = 626-395-4075 | |StaffPhone = 626-395-4075 | ||
|Manufacturer = Heidelberg Instruments | |Manufacturer = Heidelberg Instruments | ||
|Techniques = Direct | |Model = DWL-66 | ||
|Techniques = Direct Patterning,<br>Pattern Alignment,</br>Wafer and Mask Patterning | |||
|EmailList = kni-dwl66 | |EmailList = kni-dwl66 | ||
|EmailListName = DWL66 | |EmailListName = DWL66 | ||
}} | }} | ||
== Description == | == Description == | ||
The Heidelberg Instruments DWL-66 is a tool for mask making and for direct patterning of wafers by the use of a HeCd laser. Precise control of the laser head and alignment produces 800-nm resolution lithography. The DWL 66 is an extremely high-resolution imaging system where over half a million dpi is achieved using a 40-nm writeable address grid for exposing chrome plates or wafers. | The Heidelberg Instruments DWL-66 is a tool for mask making and for direct patterning of wafers by the use of a HeCd laser. Precise control of the laser head and alignment produces 800-nm resolution lithography. The DWL 66 is an extremely high-resolution imaging system where over half a million dpi (dots per inch) is achieved using a 40-nm writeable address grid for exposing chrome plates or wafers. | ||
===== | ===== Applications ===== | ||
* Direct | * Direct Writing | ||
* Grayscale | * Grayscale Writing | ||
== Resources == | == Resources == | ||
Revision as of 19:42, 27 May 2019
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Description
The Heidelberg Instruments DWL-66 is a tool for mask making and for direct patterning of wafers by the use of a HeCd laser. Precise control of the laser head and alignment produces 800-nm resolution lithography. The DWL 66 is an extremely high-resolution imaging system where over half a million dpi (dots per inch) is achieved using a 40-nm writeable address grid for exposing chrome plates or wafers.
Applications
- Direct Writing
- Grayscale Writing
Resources
SOPs
Manufacturer Manuals
Specifications
- Exposure: 442 nm wavelength HeCd laser