Rapid Thermal Processor
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Solaris Rapid Thermal Processor
[[image:|320x373px|center|]]
Instrument Type
Metrology
Techniques
Annealing
Staff Manager
Alireza Ghaffari
Staff Email
alireza@caltech.edu
Staff Phone
626-395-3984
Reserve time on
FBS
Request training via
FBS User Dashboard
Lab Location
B235 Steele
Lab Phone
626-395-1539
Manufacturer
Solaris
Model
Solaris 150
Contents
1
Description
1.1
Applications
2
Resources
2.1
SOPs
Description
Applications
Rapid Thermal Processing
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SOPs
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