Rapid Thermal Processor

Solaris Rapid Thermal Processor Instrument Type Metrology Techniques TBD Staff Manager Alireza Ghaffari Staff Email alireza@caltech.edu Staff Phone 626-395-3984 Reserve time on FBS Request training via FBS User Dashboard Lab Location B235 Steele Lab Phone 626-395-1539 Manufacturer Solaris Model TBD

Description

The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The Solaris 150 is equipped with recipe management, system diagnostics, and user-friendly interface for operator productivity. Suitable for all Clean Room environments. The system can be configured for compound semiconductor use.

Applications

• TBD

Resources

SOPs

• KNI SOP