From the KNI Lab at Caltech
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| == Description == | | == Description == |
| The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The Solaris 150 is equipped with recipe management, system diagnostics, and user-friendly interface for operator productivity. Suitable for all Clean Room environments. The system can be configured for compound semiconductor use.
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| ===== Applications ===== | | ===== Applications ===== |
Revision as of 00:05, 27 June 2023
| Solaris Rapid Thermal Processor
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| Lab Location
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B235 Steele
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| Lab Phone
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626-395-1539
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| Manufacturer
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Solaris
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| Model
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TBD
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Description
Applications
Resources
SOPs
