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|StaffName = Nathan S. Lee
|StaffName = Nathan S. Lee
|StaffPhoto = Nathan-S-Lee.jpg
|StaffPhoto = Nathan-S-Lee.jpg
|JobTitle = Plasma Process Engineer
|JobTitle = Laboratory Infrastructure Manager
|AreasResponsibility = Reactive-Ion Etching,<br>Plasma-Enhanced Deposition
|AreasResponsibility = General Infrastructure,<br>Safety
|CaltechID = nathslee
|CaltechID = nathslee
|Phone = 626-395-1319 (office)
|Phone = 626-395-4075 (office)
|OfficeLocation = 319 Steele
|OfficeLocation = 124 Steele
}}
}}
== About ==
== About ==
===== Role in the KNI =====
===== Role in the KNI =====
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Nathan Lee is the Laboratory Infrastructure Manager for The Kavli Nanoscience Institute (KNI) at the California Institute of Technology.  He oversees the daily operation of general infrastructure, operations, and safety measures within the KNI and manages onboarding of new and current members
 
After working in the semiconductor equipment industry as a hardware and process engineer for 15 years, Nathan joined Caltech in January of 2016 as a plasma process engineer for the KNI. He went on to serve as a process engineer at Applied Materials for two years before returning to Southern California and rejoining Caltech. He brings a breadth of experience in plasma process development, hardware optimization, and laboratory management to the KNI.
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===== Education =====
===== Education =====
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Nathan received his B.S. in Structural Engineering from the University of California, San Diego.


== List of Managed Instruments ==
== List of Managed Instruments ==
===== Etching =====
<!--===== Etching =====
* [[Oxford 100 DRIE: Bosch & Cryo ICP–RIE for Silicon | Silicon Etcher: Oxford Instruments DRIE System 100 Bosch & Cryo ICP–RIE]]
* [[DRIE: Bosch & Cryo ICP-RIE for Silicon | Silicon Etcher: Oxford Instruments DRIE System 100 Bosch & Cryo ICP-RIE]]
* [[Oxford 100 ICP–RIE: III/V, Metal & Silicon Etcher | III/V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP–RIE]]
* [[ICP-RIE: III-V, Metal & Silicon Etcher | III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE]]
* [[Oxford Dielectric 100 ICP–RIE: Dielectric Etcher | Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP–RIE]]
* [[ICP-RIE: Dielectric Etcher | Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE]]
* [[Plasmatherm Dual Chamber RIE: Silicon, III/V Material & Organics Etcher | Silicon, III/V Material & Organics Etcher: Plasmatherm Dual Chamber RIE]]
* [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher | Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE]]


===== Deposition =====
===== Deposition =====
* [[Oxford FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II]]
* [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II]]
* [[Oxford 100: Plasma-Enhanced Chemical Vapor Deposition (PECVD) | Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100]]
* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD) | Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100]]


===== Support Tools =====
===== Support Tools =====
* [[Tystar Tytan 1 & 2: Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
* [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)]]
 
-->
== Other Notable Content ==
===== Sub-Heading 1 =====
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===== Sub-Heading 2 =====
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== Personal ==
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Latest revision as of 20:33, 12 August 2024

Nathan S. Lee
Nathan-S-Lee.jpg
Title Laboratory Infrastructure Manager
Responsibilities General Infrastructure,
Safety
Email nathslee@caltech.edu
Phone 626-395-4075 (office)
Office 124 Steele

About

Role in the KNI

Nathan Lee is the Laboratory Infrastructure Manager for The Kavli Nanoscience Institute (KNI) at the California Institute of Technology. He oversees the daily operation of general infrastructure, operations, and safety measures within the KNI and manages onboarding of new and current members After working in the semiconductor equipment industry as a hardware and process engineer for 15 years, Nathan joined Caltech in January of 2016 as a plasma process engineer for the KNI. He went on to serve as a process engineer at Applied Materials for two years before returning to Southern California and rejoining Caltech. He brings a breadth of experience in plasma process development, hardware optimization, and laboratory management to the KNI.

Education

Nathan received his B.S. in Structural Engineering from the University of California, San Diego.

List of Managed Instruments