Dektak 3ST: Profilometer: Difference between revisions
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|RoomLocation = B235 Steele | |RoomLocation = B235 Steele | ||
|LabPhone = 626-395-1539 | |LabPhone = 626-395-1539 | ||
|PrimaryStaff = [[ | |PrimaryStaff = [[Yonghwi Kim]] | ||
|StaffEmail = | |StaffEmail = ykim@caltech.edu | ||
|StaffPhone = 626-395- | |StaffPhone = 626-395-5994 | ||
|Manufacturer = Veeco | |Manufacturer = Veeco | ||
|Model = Dektak 3ST | |Model = Dektak 3ST | ||
|Techniques = Surface Profiling | |Techniques = Surface Profiling | ||
|RequestTraining = | |RequestTraining = alireza@caltech.edu | ||
|EmailList = kni-metrology | |EmailList = kni-metrology | ||
|EmailListName = Metrology | |EmailListName = Metrology | ||
}} | }} | ||
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===== SOPs ===== | ===== SOPs ===== | ||
* [https://caltech.box.com/s/hdic8scc882tkrcjqsbaruqph9jgo75t KNI SOP] | * [https://caltech.box.com/s/hdic8scc882tkrcjqsbaruqph9jgo75t KNI SOP] | ||
* [https://caltech.box.com/s/j6br8jpkr7ov0k9dwx7wzyzt9f5fj3rt Dektak Operations Manual] | |||
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== Related Instrumentation in the KNI == | == Related Instrumentation in the KNI == | ||
Latest revision as of 21:54, 8 October 2025
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Description
The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.
Applications
- Surface Profiling
Resources
SOPs