Wet Chemistry Resources

cleaning procedures links, breakout

Sample Cleaning Resources

https://cleanroom.byu.edu/clean

Solvent Cleans

• Acetone, IPA
  • Solvent for organics, IPA cleans remaining residues due to acetone's high evaporation rate
• Acetone, Methanol
  • Similar to above except Methanol is more toxic, and a polar chemical versus IPA which is non-polar
• Acetone, Methanol, IPA
• Acetone, Methanol, IPA, DI Water
• Remover PG (50°C), IPA
• Dichloromethane, IPA
  • Caution, high evaporation rate may leave residue and beakers get quickly condense water/ice
• Nanostrip?

Wet Etching Resources

BYU Etch list https://cleanroom.byu.edu/wet_etch

find etch list book and other links http://transene.com/etch-compatibility/

Etch rates for micromachining processing http://ieeexplore.ieee.org/abstract/document/546406/

Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/document/1257354

UMich wet etch info http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching

BYU Transene Wet Etch https://transene.com/etchants/

KOH, also find alternative: https://cleanroom.byu.edu/KOH

BYU etching guidance: https://cleanroom.byu.edu/chemical_etching.html

KNI Wet Etch Recipes Table

Table of Wet Etch recipes from KNI Papers

And general table from you, not from papers, maybe from recipes?

Material	Etchant	Rate (nm/min)	Anisotropy	Selective to	Selectivity	Origin and Notes
KNI CHA Al	Al Etch Type D	~1000	Highly	Al	High	Transene
KNI PECVD SiO2	HF	~1000	Highly	SiO2	High	measured 10/19
KNI PECVD SiN3	Ex	~1000	Highly	SiN3	High	measured 10/19
KNI PECVD a-Si	KOH	~1000	Highly	Si	High	measured 10/19

Other Procedures

Liftoff

UCSB liftoff guidance: https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Lift-Off_Techniques

Electroplating

Electroplating materials supplier: https://www.technic.com/chemistry

Safety Resources

https://cleanroom.byu.edu/acid_safety

https://cleanroom.byu.edu/HF_safety

https://cleanroom.byu.edu/solvent_safety