Difference between revisions of "Wet Chemistry Resources"

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*[http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching UMich wet etch info]
*[http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching UMich wet etch info]
also find alternative:
*[https://cleanroom.byu.edu/KOH BYU KOH processing]


*[https://cleanroom.byu.edu/chemical_etching.html BYU Etching Guidance]
*[https://cleanroom.byu.edu/chemical_etching.html BYU Etching Guidance]
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*[https://www.nanotech.ucsb.edu/wiki/index.php/Wet_Etching_Recipes UCSB Wet Etching Recipes]
*[https://www.nanotech.ucsb.edu/wiki/index.php/Wet_Etching_Recipes UCSB Wet Etching Recipes]


*https://nanolab.berkeley.edu/public/manuals/process_manual.shtml
*[https://nanolab.berkeley.edu/public/manuals/process_manual.shtml Berkeley Marvell Nanofab]
 
*[https://cleanroom.byu.edu/KOH BYU KOH processing]
 
*[https://www.inrf.uci.edu/wordpress/wp-content/uploads/sop-wet-anisotropic-si-etch-using-koh.pdf UC Irvine KOH Etching]
 
*[https://www.nanofab.ualberta.ca/wp-content/uploads/downloads/2016/07/KOH-Etching-Info-2013_V2.pdf U Alberta KOH Etching]


==Commercial Materials==
==Commercial Materials==

Revision as of 11:59, 3 November 2019

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Sample Cleaning Resources

Solvent Cleans

Etching Cleans

RCA-1

Recipe steps or links

https://en.wikipedia.org/wiki/RCA_clean

Piranha Etch

HF Dip

Plasma Cleans

Wet Etching Resources

Research Papers and Books

External Laboratories

Commercial Materials

KNI Wet Etch Recipes Table

Table of Wet Etch recipes from KNI Papers

And general table from you, not from papers, maybe from recipes?

Material Etchant Rate (nm/min) Anisotropy Selective to Selectivity Origin and Notes
KNI CHA Al Al Etch Type D ~1000 Highly Al High Matches Transene's expected rate
KNI PECVD SiO2 HF ~1000 Highly SiO2 High measured 10/19
KNI PECVD SiN3 Ex ~1000 Highly SiN3 High measured 10/19
KNI PECVD a-Si KOH ~1000 Highly Si High Link to KNI member's research paper

Other Procedures

Liftoff

Electroplating

Safety Resources

Do we have materials to link to?

https://cleanroom.byu.edu/acid_safety

https://cleanroom.byu.edu/HF_safety

https://cleanroom.byu.edu/solvent_safety