Difference between revisions of "Wet Chemistry Resources"

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=Wet Etching Resources=
=Wet Etching Resources=


BYU Etch list
find etch list book and other links
https://cleanroom.byu.edu/wet_etch
 
==Research Papers and Books==
 
*[http://ieeexplore.ieee.org/abstract/document/546406/ Etch rates for micromachining processing]


find etch list book and other links
*[https://ieeexplore.ieee.org/document/1257354 Etch rates for micromachining processing-Part II]
http://transene.com/etch-compatibility/
 
==External Laboratories==
 
*[https://cleanroom.byu.edu/wet_etch BYU Etching list]
 
*[http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching UMich wet etch info]


Etch rates for micromachining processing
also find alternative:
http://ieeexplore.ieee.org/abstract/document/546406/
*[https://cleanroom.byu.edu/KOH BYU KOH processing]


Etch rates for micromachining processing-Part II
*[https://cleanroom.byu.edu/chemical_etching.html BYU Etching Guidance]
https://ieeexplore.ieee.org/document/1257354


UMich wet etch info
==Commercial Materials==
http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching


BYU Transene Wet Etch
*[http://transene.com/etch-compatibility/ Transene Etch Compatibility Chart]
https://transene.com/etchants/


KOH, also find alternative:
*[https://transene.com/etchants/ Transene Etchant List]
https://cleanroom.byu.edu/KOH


BYU etching guidance:
https://cleanroom.byu.edu/chemical_etching.html


==KNI Wet Etch Recipes Table==
==KNI Wet Etch Recipes Table==
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==Liftoff==
==Liftoff==


UCSB liftoff guidance:
*[https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Lift-Off_Techniques UCSB liftoff guidance]
https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Lift-Off_Techniques


==Electroplating==
==Electroplating==


Electroplating materials supplier:
*[https://www.technic.com/chemistry Technic electroplating materials supplier]
https://www.technic.com/chemistry


=Safety Resources=
=Safety Resources=

Revision as of 09:38, 31 October 2019

Template:NOINDEX

cleaning procedures links, breakout

Sample Cleaning Resources

https://cleanroom.byu.edu/clean

Solvent Cleans

  • Acetone, IPA
    • Solvent for organics, IPA cleans remaining residues due to acetone's high evaporation rate
  • Acetone, Methanol
    • Similar to above except Methanol is more toxic, and a polar chemical versus IPA which is non-polar
  • Acetone, Methanol, IPA
  • Acetone, Methanol, IPA, DI Water
  • Remover PG (50°C), IPA
  • Dichloromethane, IPA
    • Caution, high evaporation rate may leave residue and beakers get quickly condense water/ice
  • Nanostrip?

Etching Cleans

RCA-1

Piranha Etch

HF Dip

Plasma Cleans

Wet Etching Resources

find etch list book and other links

Research Papers and Books

External Laboratories

also find alternative:

Commercial Materials


KNI Wet Etch Recipes Table

Table of Wet Etch recipes from KNI Papers

And general table from you, not from papers, maybe from recipes?

Material Etchant Rate (nm/min) Anisotropy Selective to Selectivity Origin and Notes
KNI CHA Al Al Etch Type D ~1000 Highly Al High Transene
KNI PECVD SiO2 HF ~1000 Highly SiO2 High measured 10/19
KNI PECVD SiN3 Ex ~1000 Highly SiN3 High measured 10/19
KNI PECVD a-Si KOH ~1000 Highly Si High measured 10/19

Other Procedures

Liftoff

Electroplating

Safety Resources

https://cleanroom.byu.edu/acid_safety

https://cleanroom.byu.edu/HF_safety

https://cleanroom.byu.edu/solvent_safety