Usage Rates

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Overview of KNI Lab User Fees
Note: Rates below are valid beginning October 1, 2020 and are subject to change

  • Fees are incurred on a pay-as-you-go basis. (tools are charged by the hour or portion thereof)
  • Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during calendar months of non-use.

Caltech Academic Usage Rates

Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. *NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,000.

Equipment Name Lab Area Hourly Rate
Cleanroom Hourly Rate General KNI Cleanroom Use $27.60
AJA Orion UHV Chalcogenide Sputter System Deposition, Evaporation & Sputtering $68.46
AJA Orion UHV Dielectric Sputter System Deposition, Evaporation & Sputtering $68.46
CHA MK40 E-Beam Evaporator Deposition, Evaporation & Sputtering $68.46
Lesker Labline E-Beam Evaporator Deposition, Evaporation & Sputtering $68.46
Oxford Instruments FlexAl ALD System Deposition, Evaporation & Sputtering $68.46
Oxford PECVD System 100 Deposition, Evaporation & Sputtering $68.46
Para Tech LabTop 3000 Parylene Coater Deposition, Evaporation & Sputtering $68.46
Bruker Dimension ICON AFM Microscopy $67.74
FEI Nova 200 NanoLab Dualbeam FIB/SEM Microscopy $67.74
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy $67.74
FEI Quanta ESEM /NPGS Microscopy $67.74
FEI Sirion FESEM Microscopy $67.74
FEI Tecnai TF20 STEM Microscopy $67.74
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy *Not Capped* $75.00
Zeiss Orion NanoFab Microscopy $67.74
Oxford Dielectric System 100 ICP/RIE Etch $97.91
Oxford DRIE System 100 ICP/RIE Etch $97.91
Oxford III-V System 100 ICP/RIE Etch $97.91
Plasmatherm Reactive Ion Etch Etch $97.91
XeF2 silicon etcher Etch $97.91
Raith EBPG 5000+ Electron Beam Writer Electron Beam Lithography $125.18
Raith EBPG 5200 Electron Beam Writer Electron Beam Lithography $125.18
GCA 6300 DSW Stepper Optical Lithography $63.82
Heidelberg DWL-66 Optical Lithography $63.82
NILT CNI-PV 2.1 Nanoimprint Optical Lithography $63.82
Nanoscribe Photonic Professional GT Optical Lithography $63.82
Suss Microtech MA6 Aligner Optical Lithography $63.82
Suss Microtech MA6/BA6 Aligner Optical Lithography $63.82
Dynatex GST-150 Scriber/Breaker Support & Misc Tools $43.56
Suss SB6L Wafer Bonder Support & Misc Tools $43.56
Tousimis Critical Point Dryer Support & Misc Tools $43.56
Tystar Tytan Dry Oxide + annealing Support & Misc Tools $43.56
Tystar Tytan Wet + Dry Oxide + annealing Support & Misc Tools $43.56
Westbond 7476D Wire Bonder Support & Misc Tools $43.56
Woolam M-2000 Spectroscopic Ellipsometer Support & Misc Tools $43.56


  • TF-30 STEM in Keck Building: Lab members who only use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use does NOT qualify for the quarterly lab fee cap. Users will be billed for actual use at the hourly rate.
  • Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
  • Dedicated KNI Staff Labor/Support for Research is $100/hr.


  • Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2021 is 67.5%

Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.