Usage Rates

The rates below are valid beginning October 2018 and are subject to change.

NOTE:

• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A ("overhead") fees.
• Individual Tools listed below are charged by the hour or portion thereof.
• Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. The market prices per gram are passed on to users and do not include Caltech overhead.

Equipment Rates

Name	Category	Caltech Rate	JPL/Non-Caltech Acad/Govt Rate	Corporate Rate**
Contact Mask Aligners	Lithography	$36.00	$59.22	$88.83
Direct-Write Laser System (DWL-66)	Lithography	$47.00	$77.32	$115.97
Electron Beam Pattern Generators (100kV)	Lithography	$62.00	$101.99	$152.99
He/Ne/Ga-FIB w/ Multibeam Pattern Generator (Orion)	Lithography/Microscopy	$65.00	$106.93	$160.39
SEM Nanometer Pattern Generation System (Quanta)	Lithography/Microscopy	$39.00	$64.16	$96.23
Two-Photon Lithography ("Microscale 3D Printing")	Lithography	$8.00	$13.16	$19.74
Etcher: Dielectric Material ("380")	Etching	$50.00	$82.25	$123.38
Etcher: III/V Material, Metal & Silicon	Etching	$50.00	$82.25	$123.38
Etcher: Silicon (DRIE)	Etching	$50.00	$82.25	$123.38
Etcher: Silicon, III/V Material & Organics (RIE)	Etching	$50.00	$82.25	$123.38
Etcher: XeF2 for Silicon	Etching	$50.00	$82.25	$123.38
Atomic Layer Deposition	Deposition	$67.00	$110.22	$165.32
E-beam Evaporator: Metals Al, Au, Pt & Ti (Lesker Labline)	Deposition	$24.00	$39.48	$59.22
E-beam Evaporator: Metals & Oxides (CHA)	Deposition	$24.00	$39.48	$59.22
Plasma-Enhanced Chemical Vapor Deposition	Deposition	$67.00	$110.22	$165.32
Sputter: Chalcogenide Material	Deposition	$70.00	$115.15	$172.73
Sputter: Dielectric Material	Deposition	$37.00	$60.87	$91.30
Atomic Force Microscope	Microscopy	$41.00	$67.45	$101.17
SEM, Ga-FIB, GIS & Omniprobe (Nova 600)	Microscopy	$65.00	$106.93	$160.39
SEM & EDS (Sirion)	Microscopy	$39.00	$64.16	$96.23
SEM, EDS & WDS (Nova 200)	Microscopy	$65.00	$106.93	$160.39
TEM, STEM, EDS & HAADF (TF-30, 80-300 kV)	Microscopy	$97.00	$159.57	$239.35
Critical Point Dryer	Support Tools	$54.00	$88.83	$133.25
Tube Furnaces	Support Tools	$5.00	$8.23	$12.34
Monthly Base Rate*	General Equipment*	$655.00	$1,077.48	$1,616.21

*Monthly Base Rate

The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:

Profilometers, Chemical Wet Benches, Dynatex GST-150 Scriber Breaker, J.A. Woolam Spectroscopic Ellipsometer M-2000, TF20 TEM, GCA 6300 Stepper, Rapid Thermal Processor, Paratech Parylene Coater, Suss SB6L Wafer Bonder, Westbond Wire Bonder, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (gowning, chemicals, equipment reservation software, etc.).

**Corporate Memberships

For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding: the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.