Difference between revisions of "Usage Rates"

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'''Overview of KNI Lab User Fees''' <br>
'''Overview of KNI Lab User Fees''' <br>
''Note: Rates below are valid beginning October 1, 2020 and are subject to change''
''Note: Rates below are valid beginning October 1, 2021 and are subject to change''


* Fees are incurred on a pay-as-you-go basis. (tools are charged by the hour or portion thereof)
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof)
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during calendar months of non-use.
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during calendar months of non-use


== Caltech Academic Usage Rates ==
== Caltech Academic Usage Rates ==
Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. '''*NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,000.'''
Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. '''*NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,500.'''


{| class="wikitable" style="width: 75%;"
{| class="wikitable" style="width: 75%;"
Line 16: Line 16:
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Cleanroom Hourly Rate  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Cleanroom Hourly Rate  
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Cleanroom Use
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Cleanroom Use
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $27.60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $28
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Chalcogenide Sputter System
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Chalcogenide Sputter System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Dielectric Sputter System
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Dielectric Sputter System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Instruments FlexAl ALD System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Para Tech LabTop 3000 Parylene Coater
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Evaporation & Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $68.46
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Bruker Dimension ICON AFM
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Bruker Dimension ICON AFM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam FIB/SEM
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam FIB/SEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF20 STEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:center; background-color:#fec38d;" | Microscopy *Not Capped*
!scope="col" style="text-align:center; background-color:#fec38d;" | Microscopy *Not Capped*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $75.00
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $90
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $67.74
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $79
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $97.91
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $97.91
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $97.91
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $97.91
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| XeF2 silicon etcher
!scope="col" style="text-align:left; background-color:#ffd8b4;"| XeF2 silicon etcher
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $97.91
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography
!scope="col" style="text-align:center; background-color:#fec38d;" | Electron Beam Lithography *Not Capped*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $125.18
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $115
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5200 Electron Beam Writer
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5200 Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography
!scope="col" style="text-align:center; background-color:#fec38d;" | Electron Beam Lithography *Not Capped*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $125.18
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $115
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| GCA 6300 DSW Stepper
!scope="col" style="text-align:left; background-color:#ffd8b4;"| GCA 6300 DSW Stepper
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Heidelberg DWL-66
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Heidelberg DWL-66
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| NILT CNI-PV 2.1 Nanoimprint
!scope="col" style="text-align:left; background-color:#ffd8b4;"| NILT CNI-PV 2.1 Nanoimprint
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6 Aligner
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6 Aligner
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6/BA6 Aligner
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6/BA6 Aligner
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $63.82
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Dynatex GST-150 Scriber/Breaker
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Dynatex GST-150 Scriber/Breaker
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Para Tech LabTop 3000 Parylene Coater
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss SB6L Wafer Bonder
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss SB6L Wafer Bonder
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tousimis Critical Point Dryer  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tousimis Critical Point Dryer  
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Dry Oxide + annealing
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Dry Oxide + annealing
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Wet + Dry Oxide + annealing
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Wet + Dry Oxide + annealing
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Westbond 7476D Wire Bonder
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Westbond 7476D Wire Bonder
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Woolam M-2000 Spectroscopic Ellipsometer
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Woolam M-2000 Spectroscopic Ellipsometer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $43.56
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|-
|}
|}
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'''FEE CAP EXCEPTIONS'''  
'''FEE CAP EXCEPTIONS'''  
*TF-30 STEM in Keck Building: Lab members who '''only''' use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use does NOT qualify for the quarterly lab fee cap. Users will be billed for actual use at the hourly rate.
*EBPG 5000+ and 5200 systems are not included in the quarterly academic/government rate cap. Actual hours will be billed.
*TF-30 STEM in Keck Building: Lab members who '''only''' use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use is not included in the quarterly academic/government rate cap. Actual hours will be billed.
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.


'''OVERHEAD FEE/INDIRECT COST'''  
'''OVERHEAD FEE/INDIRECT COST'''  
*Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2020 is 67.5%
*Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2022 is 68.4%


==Corporate Memberships==
==Corporate Memberships==


For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.
For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.

Revision as of 00:48, 2 October 2021

Overview of KNI Lab User Fees
Note: Rates below are valid beginning October 1, 2021 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof)
  • Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during calendar months of non-use

Caltech Academic Usage Rates

Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. *NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,500.

Equipment Name Lab Area Hourly Rate
Cleanroom Hourly Rate General KNI Cleanroom Use $28
AJA Orion UHV Chalcogenide Sputter System Evaporation, Sputtering $62
AJA Orion UHV Dielectric Sputter System Evaporation, Sputtering $62
CHA MK40 E-Beam Evaporator Evaporation, Sputtering $62
Lesker Labline E-Beam Evaporator Evaporation, Sputtering $62
Bruker Dimension ICON AFM Microscopy $62
FEI Nova 200 NanoLab Dualbeam FIB/SEM Microscopy $62
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy $62
FEI Quanta ESEM /NPGS Microscopy $62
FEI Sirion FESEM Microscopy $62
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy *Not Capped* $90
Zeiss Orion NanoFab Microscopy $79
Oxford Dielectric System 100 ICP/RIE Deposition, Etch $89
Oxford DRIE System 100 ICP/RIE Deposition, Etch $89
Oxford FlexAl ALD System Deposition, Etch $89
Oxford III-V System 100 ICP/RIE Deposition, Etch $89
Oxford PECVD System 100 Deposition, Etch $89
Plasmatherm Reactive Ion Etch Deposition, Etch $89
XeF2 silicon etcher Deposition, Etch $89
Raith EBPG 5000+ Electron Beam Writer Electron Beam Lithography *Not Capped* $115
Raith EBPG 5200 Electron Beam Writer Electron Beam Lithography *Not Capped* $115
GCA 6300 DSW Stepper Optical Lithography $62
Heidelberg DWL-66 Optical Lithography $62
NILT CNI-PV 2.1 Nanoimprint Optical Lithography $62
Nanoscribe Photonic Professional GT Optical Lithography $62
Suss Microtech MA6 Aligner Optical Lithography $62
Suss Microtech MA6/BA6 Aligner Optical Lithography $62
Dynatex GST-150 Scriber/Breaker Support & Misc Tools $44
Para Tech LabTop 3000 Parylene Coater Support & Misc Tools $44
Suss SB6L Wafer Bonder Support & Misc Tools $44
Tousimis Critical Point Dryer Support & Misc Tools $44
Tystar Tytan Dry Oxide + annealing Support & Misc Tools $44
Tystar Tytan Wet + Dry Oxide + annealing Support & Misc Tools $44
Westbond 7476D Wire Bonder Support & Misc Tools $44
Woolam M-2000 Spectroscopic Ellipsometer Support & Misc Tools $44


FEE CAP EXCEPTIONS

  • EBPG 5000+ and 5200 systems are not included in the quarterly academic/government rate cap. Actual hours will be billed.
  • TF-30 STEM in Keck Building: Lab members who only use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use is not included in the quarterly academic/government rate cap. Actual hours will be billed.
  • Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
  • Dedicated KNI Staff Labor/Support for Research is $100/hr.

OVERHEAD FEE/INDIRECT COST

  • Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2022 is 68.4%

Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.