Process Recipe Library

From the KNI Lab at Caltech
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You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories:

  1. All Content (requires login with a email address)
  2. Publicly available content (no login required)

Lithography Process Recipes

Electron Beam Lithography
Optical Lithography

Deposition Process Recipes

Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)