Difference between revisions of "Process Recipe Library"

From the KNI Lab at Caltech
Jump to navigation Jump to search
Line 28: Line 28:
* [https://caltech.box.com/s/3pa2im5jj1e86rdozwigt8yfnb8fi5k3 S1813 Photoresist Recipe]
* [https://caltech.box.com/s/3pa2im5jj1e86rdozwigt8yfnb8fi5k3 S1813 Photoresist Recipe]
* [https://caltech.app.box.com/file/634671303816 SU-8 Photoresist Recipe]
* [https://caltech.app.box.com/file/634671303816 SU-8 Photoresist Recipe]
* [https://caltech.box.com/s/3bw1oifk4uysj4ehmyeivhngmkpt0r4p LOR7B & S1805 Photoresist Stack Recipe]


== Deposition Process Recipes ==
== Deposition Process Recipes ==

Revision as of 23:47, 31 March 2020

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Neon Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching
Wet Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)

Thermal Processing

Wet Oxidation

Multi-Technique Fabrication Processes