Difference between revisions of "Process Recipe Library"
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* [https://caltech.box.com/s/oxxv5sy3j7wbqyjc8r9x2wqheabne2lg NbO<sub>x</sub> sputtering recipe] | * [https://caltech.box.com/s/oxxv5sy3j7wbqyjc8r9x2wqheabne2lg NbO<sub>x</sub> sputtering recipe] | ||
* [https://caltech.box.com/s/95qrpvvggcaztmpc7whd9v9o4d9rih5x TiO<sub>2</sub> sputtering recipe] | * [https://caltech.box.com/s/95qrpvvggcaztmpc7whd9v9o4d9rih5x TiO<sub>2</sub> sputtering recipe] | ||
* [https://caltech.box.com/s/k669kh04xglamkidhuo7xq04xan146xt | * [https://caltech.box.com/s/k669kh04xglamkidhuo7xq04xan146xt AlN sputtering recipe] | ||
* [https://caltech.box.com/s/7cqdk2g5ic2wa35lu4y2fu03esfk7sdy Al<sub>2</sub>O<sub>3</sub> sputtering recipe] | * [https://caltech.box.com/s/7cqdk2g5ic2wa35lu4y2fu03esfk7sdy Al<sub>2</sub>O<sub>3</sub> sputtering recipe] | ||
* [https://caltech.box.com/s/a49yh35hkb2x5qnskivzde0y8z0o4cpn Guide to maintaining a plasma using gradual pressure changes] | * [https://caltech.box.com/s/a49yh35hkb2x5qnskivzde0y8z0o4cpn Guide to maintaining a plasma using gradual pressure changes] | ||
Revision as of 19:49, 4 February 2020
You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:
- All Content (requires login with a caltech.edu email address)
- Publicly available content (no login required)
Lithography Process Recipes
Electron Beam Lithography
- ZEP 520A Resist: Procedure for spinning, writing & development (Caltech-only access)
- HSQ Resist: Procedure for spinning, writing & development (Caltech-only access)
- Performing Aligned EBL Patterning Steps with NPGS on an SEM | Alignment Template Files
Helium Ion Beam Lithography
Optical Lithography
Deposition Process Recipes
Sputtering
- SnO2 sputtering recipe
- NbOx sputtering recipe
- TiO2 sputtering recipe
- AlN sputtering recipe
- Al2O3 sputtering recipe
- Guide to maintaining a plasma using gradual pressure changes
Chemical Vapor Deposition (CVD)
Etching Process Recipes
Dry Etching
- Comparison of etch rates using different sample-fixing oils
- In-situ (dielectric sputter) RF plasma etch of thermal SiO2
Wet Etching
Microscopy Process Recipes
Focused Ion Beam (FIB) Systems
- Cutting & Imaging Cross-sections with SEM/Ga-FIB
- Preparing TEM Lamella Samples with SEM/Ga-FIB
- Helium Ion Beam Lithography (HIBL) – Parameter Guide
- Helium Ion Beam Imaging with the Electron Flood Gun – Parameter Guide
- Source Rebuild Guide for ORION NanoFab He- & Ne-FIB
Scanning Electron Microscopes (SEMs)
- Environmental SEM (ESEM) Imaging Guide (for biological and highly non-conductive specimens)
- Performing Aligned EBL Patterning Steps with NPGS on an SEM | Alignment Template Files