Difference between revisions of "Process Recipe Library"

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===== Dry Etching =====
===== Dry Etching =====
* [https://caltech.box.com/s/3b9zbdj1uoazz7zbz8png25c2ba65vas Comparison of etch rates using different sample-fixing oils]
* [https://caltech.box.com/s/3b9zbdj1uoazz7zbz8png25c2ba65vas Comparison of etch rates using different sample-fixing oils]
* [https://caltech.box.com/s/vbjlzmbprhw1sg3auoz1oso5clwrme87 In-situ (dielectric sputter) RF plasma etch of thermal SiO2]
===== Wet Etching =====
===== Wet Etching =====
* [https://caltech.box.com/s/ob0wosa8tp79xo3wa3taxbjy24kya6qs HF etching of SiO2 deposited via wet thermal oxidation]
* [https://caltech.box.com/s/ob0wosa8tp79xo3wa3taxbjy24kya6qs HF etching of SiO2 deposited via wet thermal oxidation]

Revision as of 19:21, 4 February 2020

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching
Wet Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)