Difference between revisions of "Process Recipe Library"

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===== Electron Beam Lithography =====
===== Electron Beam Lithography =====
* [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)]
* [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)]
===== Helium Ion Beam Lithography =====
* [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)]
* [https://caltech.box.com/s/3s0k77mgx26ytfnafttpoalcknmk7npu Helium Ion Beam Lithography (HIBL) – Parameter Recipe]
===== Optical Lithography =====
===== Optical Lithography =====
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning procedure]
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning procedure]

Revision as of 16:15, 27 November 2019

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)