Difference between revisions of "Process Recipe Library"
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* [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)] | * [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)] | ||
===== Optical Lithography ===== | ===== Optical Lithography ===== | ||
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning | * [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning procedure] | ||
* [https://caltech.box.com/s/quqnspqndxtyo8jz0l37j7n9n3l40w5a S1813 resist spinning | * [https://caltech.box.com/s/quqnspqndxtyo8jz0l37j7n9n3l40w5a S1813 resist spinning procedure] | ||
== Deposition Process Recipes == | == Deposition Process Recipes == | ||
Revision as of 02:51, 8 November 2019
You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:
- All Content (requires login with a caltech.edu email address)
- Publicly available content (no login required)
Lithography Process Recipes
Electron Beam Lithography
Optical Lithography
Deposition Process Recipes
Sputtering
Chemical Vapor Deposition (CVD)
Etching Process Recipes
Dry Etching
Microscopy Process Recipes
Focused Ion Beam (FIB) Systems
- Cutting & Imaging Cross-sections with SEM/Ga-FIB
- Preparing TEM Lamella Samples with SEM/Ga-FIB
- Source rebuild guide for ORION NanoFab He- & Ne-FIB