Difference between revisions of "Process Recipe Library"

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== Microscopy Process Recipes ==
== Microscopy Process Recipes ==
===== Focused Ion Beam (FIB) Systems =====
===== Focused Ion Beam (FIB) Systems =====
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Cutting & Imaging Cross-sections with SEM/Ga-FIB]
* [https://caltech.box.com/s/3l3w507dxwosuya3nbxgk30tdqyp4qy9 Preparing TEM Lamella Samples with SEM/Ga-FIB]
* [https://caltech.box.com/s/qobquoi3hs0izeyhdg5d8px9wmmdzuxw Source rebuild guide for ORION NanoFab He- & Ne-FIB]
* [https://caltech.box.com/s/qobquoi3hs0izeyhdg5d8px9wmmdzuxw Source rebuild guide for ORION NanoFab He- & Ne-FIB]
===== Scanning Electron Microscopes (SEMs) =====
===== Scanning Electron Microscopes (SEMs) =====

Revision as of 00:06, 8 November 2019

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories:

  1. All Content (requires login with a caltech.edu email address)
  2. Publicly available content (no login required)


Lithography Process Recipes

Electron Beam Lithography
Optical Lithography

Deposition Process Recipes

Sputtering
Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)