Difference between revisions of "Process Recipe Library"

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== Lithography Process Recipes ==
== Lithography Process Recipes ==
===== Electron Beam Lithography =====
===== Electron Beam Lithography =====
* [https://caltech.box.com/s/m1vf71b2df8zffiz7hp4p1ay6p6kv4k9 ZEP 520A resist spinning procedure (Caltech-only access)]
* [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)]
===== Optical Lithography =====
===== Optical Lithography =====
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe]
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe]

Revision as of 00:01, 8 November 2019