Difference between revisions of "Process Recipe Library"
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(Created page with "You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Process Recipe Libraries: # [https://caltech.app.box.com/folder/89929833...") |
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You can browse the available recipes below, by lab area. You can also browse directly within the KNI's | You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories: | ||
# [https://caltech.app.box.com/folder/89929833301 All Content (requires login with a caltech.edu email address)] | # [https://caltech.app.box.com/folder/89929833301 All Content (requires login with a caltech.edu email address)] | ||
# [https://caltech.box.com/s/uqtkc7xev3xvda2ueykt7cj1886ok1mg Publicly available content (no login required)] | # [https://caltech.box.com/s/uqtkc7xev3xvda2ueykt7cj1886ok1mg Publicly available content (no login required)] | ||
== Lithography Process Recipes == | == Lithography Process Recipes == | ||
===== Electron Beam Lithography ===== | ===== Electron Beam Lithography ===== | ||
* [https://caltech.box.com/s/m1vf71b2df8zffiz7hp4p1ay6p6kv4k9 ZEP 520A resist spinning procedure ( | * [https://caltech.box.com/s/m1vf71b2df8zffiz7hp4p1ay6p6kv4k9 ZEP 520A resist spinning procedure (Caltech-only access)] | ||
===== Optical Lithography ===== | ===== Optical Lithography ===== | ||
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe] | * [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe] | ||
Revision as of 23:53, 7 November 2019
You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories:
- All Content (requires login with a caltech.edu email address)
- Publicly available content (no login required)