Nova 200 NanoLab: SEM, EDS & WDS

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Nova 200 NanoLab
KNI-Si-and-Pt-Pillar.jpg
Instrument Type Microscopy
Techniques SEM, EDS, WDS,
Immersion Lens Imaging
Staff Manager Matthew S. Hunt, PhD
Staff Email matthew.hunt@caltech.edu
Staff Phone 626-395-5994
Reserve time on LabRunr
Request training by email
Sign up for SEM-FIB email list
Lab Location B203 Steele
Lab Phone 626-395-1542
Manufacturer FEI (now Thermo Fisher)
Model {{{Model}}}
Nova-NanoLab-600.jpg

Description

The Nova 200 is the KNI's highest-resolution analytical scanning electron microscope (SEM), equipped with an immersion-lens for imaging sub-10 nm features and both energy dispersive spectroscopy (EDS) and wavelength dispersive spectroscopy (WDS) detectors for compositional analysis. It is also outfitted with a gallium focused ion beam (Ga-FIB) column, which is currently not operational because the Nova 600 NanoLab and ORION NanoFab together meet the KNI's Ga-FIB demand; gallium could be reactivated on the Nova 200 the future. See a full list of training and educational resources for this instrument below.

SEM Applications
  • Ultra-High-Resolution Imaging (Immersion Mode)
  • High-Resolution Imaging (Field-Free Mode)
  • Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
  • Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)
  • Tungsten deposition via Gas Injection System (GIS)
  • Automated imaging with RunScript program & AutoScript language
Analytical Applications
  • Compositional analysis with EDS (via x-ray detection)
  • Compositional analysis with WDS (via x-ray detection)

Resources

SOPs & Troubleshooting
Video Tutorials
Graphical Handouts
Presentations
Manufacturer Manuals

Specifications

Manufacturer Specifications
Scanning Electron Microscope (SEM) Specifications
  • 0.5 to 30.0 kV
  • Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
  • etc.
Gallium Focused Ion Beam (Ga-FIB) Specifications
  • 5.0 to 30.0 kV
  • 10 pA - 20 nA
  • etc.