Difference between revisions of "Equipment List"

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= Lithography =
 
= Lithography =
 
===== Electron Beam Lithography =====
 
===== Electron Beam Lithography =====
 +
* Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)
 
* Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)
 
* Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)
* Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)
+
* Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)
* Nanometer Pattern Generation System: Quanta 200F SEM with NPGS (1-30 kV)
+
* Nanometer Pattern Generation System: Thermo Fisher Tecnai TF-20 S/TEM with NPGS (80-200 kV)
 
===== Ion Beam Lithography =====
 
===== Ion Beam Lithography =====
 
* He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)
 
* He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)
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= Deposition Equipment =
+
= Deposition =
 
===== Evaporation =====
 
===== Evaporation =====
 
* Al, Au, Pt & Ti: Kurt J Lesker Labline  
 
* Al, Au, Pt & Ti: Kurt J Lesker Labline  
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* Dielectric Sputterer: AJA International ATC Orion 8
 
* Dielectric Sputterer: AJA International ATC Orion 8
 
* Chalcogenide Sputterer: AJA International ATC Orion 5
 
* Chalcogenide Sputterer: AJA International ATC Orion 5
===== Plasma- & Thermal-Enhanced Deposition =====
+
===== Plasma-Enhanced Deposition =====
 
* Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
 
* Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
 
* Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100
 
* Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100
* Tube Furnaces: Tystar Tytan (Wet & Dry Oxidation and Annealing)
+
===== Packaging =====
 +
* Parylene Coater: Para Tech LabTop 3000
 +
 
  
  
= Etching Equipment =
+
= Etching =
===== Dry Reactive-Ion Etching (RIE) =====
+
===== Dry Etching =====
 
* Silicon Etcher: Oxford Instruments DRIE System 100 Cryo ICP–RIE
 
* Silicon Etcher: Oxford Instruments DRIE System 100 Cryo ICP–RIE
 
* Silicon, III/V Material & Metal Etcher: Oxford Instruments DRIE System 100 ICP–RIE
 
* Silicon, III/V Material & Metal Etcher: Oxford Instruments DRIE System 100 ICP–RIE
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* Silicon, III/V Material & Organics Etcher: Plasmatherm RIE
 
* Silicon, III/V Material & Organics Etcher: Plasmatherm RIE
 
* Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE
 
* Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE
 +
* XeF2 Silicon Etcher
 
===== Wet Etching =====
 
===== Wet Etching =====
* Wet Chemistry
+
* Available Wet Chemistry Techniques
  
  
= Microscopy Instrumentation =
+
= Microscopy =
==== Focused Ion Beam (FIB) Systems ====
+
===== Focused Ion Beam (FIB) Systems =====
 
* He/Ne/Ga-FIB: Zeiss ORION NanoFab
 
* He/Ne/Ga-FIB: Zeiss ORION NanoFab
 
* SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600  
 
* SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600  
===== Scanning Electron Microscopes (SEMs) ====
+
===== Scanning Electron Microscopes (SEMs) =====
* SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600
 
 
* SEM/EDS/WDS: Thermo Fisher Nova NanoLab 200
 
* SEM/EDS/WDS: Thermo Fisher Nova NanoLab 200
 +
* SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600
 
* SEM/EDS: Thermo Fisher Sirion
 
* SEM/EDS: Thermo Fisher Sirion
* SEM/ESEM: Thermo Fisher Quanta 200F  
+
* SEM/ESEM: Thermo Fisher Quanta 200F
==== Transmission Electron Microscopes (TEMs) ====
+
===== Transmission Electron Microscopes (TEMs) =====
* TEM/STEM/EDS/EELS/EFTEM: Thermo Fisher Tecnai TF-20 (80-300 kV)
+
* TEM/STEM/EDS/EELS/EFTEM/NPGS: Thermo Fisher Tecnai TF-20 (80-300 kV)
 
* TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-200 kV)
 
* TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-200 kV)
==== Scanning Probe Microscopes ====
+
===== Scanning Probe Microscopes ======
 
* Atomic Force Microscope (AFM): Bruker Dimension ICON
 
* Atomic Force Microscope (AFM): Bruker Dimension ICON
 
* Profilometer: Veeco Dektak 3ST
 
* Profilometer: Veeco Dektak 3ST
 +
===== Optical Microscopes =====
 +
* Fluorescent Microscope: Olympus Yadda-Yadda
  
  
 
= Support Tools =
 
= Support Tools =
==== Wafer Processing ====
+
===== Metrology =====
 +
* Spectroscopic Ellipsometry: Woolam M-2000
 +
* Thin Film Measurement: Filmetrics model F40
 +
* Profilometer: Veeco Dektak 3ST
 +
 
 +
===== Thermal Processing =====
 +
* Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)
 +
* Rapid Thermal Annealer: Jipelec Jetfirst 150
 +
* Rapid Thermal Processer: Modular Process Technology RTP-600S
 +
 
 +
===== Wafer Processing =====
 +
* Scriber-Breaker: Dynatex GST-150
 +
* Wafer Bonder: Suss Microtech model SB6L
 +
 
 +
===== Device Processing =====
 +
* Wedge-Wedge Wire Bonder: Westbond model 7476D-79
 +
* Electrical Probing Station:
 +
 
 +
 
 +
 
 +
==== Miscellaneous ====
 +
* Critical Point Dryer: Tousimis Automegasamdri 915B

Revision as of 00:31, 26 March 2019

Lithography

Electron Beam Lithography
  • Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)
  • Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)
  • Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)
  • Nanometer Pattern Generation System: Thermo Fisher Tecnai TF-20 S/TEM with NPGS (80-200 kV)
Ion Beam Lithography
  • He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)
Optical Lithography
  • Contact Mask Aligners: Suss Microtech models MA/BA6 & MA6/BA6
  • i-Line Wafer Stepper: GCA model 6300
  • Direct-Write Laser System: Heidelberg Instruments DWL-66
  • Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT


Deposition

Evaporation
  • Al, Au, Pt & Ti: Kurt J Lesker Labline
  • Metals & Oxides: CHA Industries Mark 40
  • Carbon: Leica EM ACE600 Carbon Evaporator
Sputtering
  • Dielectric Sputterer: AJA International ATC Orion 8
  • Chalcogenide Sputterer: AJA International ATC Orion 5
Plasma-Enhanced Deposition
  • Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
  • Plasma-Enhanced Chemical Vapor Deposition (PECVD): Oxford Instruments System 100
Packaging
  • Parylene Coater: Para Tech LabTop 3000


Etching

Dry Etching
  • Silicon Etcher: Oxford Instruments DRIE System 100 Cryo ICP–RIE
  • Silicon, III/V Material & Metal Etcher: Oxford Instruments DRIE System 100 ICP–RIE
  • Dielectric Material Etcher: Oxford Instruments Dielectric System 100, 380 V source, ICP–RIE
  • Silicon, III/V Material & Organics Etcher: Plasmatherm RIE
  • Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE
  • XeF2 Silicon Etcher
Wet Etching
  • Available Wet Chemistry Techniques


Microscopy

Focused Ion Beam (FIB) Systems
  • He/Ne/Ga-FIB: Zeiss ORION NanoFab
  • SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600
Scanning Electron Microscopes (SEMs)
  • SEM/EDS/WDS: Thermo Fisher Nova NanoLab 200
  • SEM/Ga-FIB/Omniprobe: Thermo Fisher Nova NanoLab 600
  • SEM/EDS: Thermo Fisher Sirion
  • SEM/ESEM: Thermo Fisher Quanta 200F
Transmission Electron Microscopes (TEMs)
  • TEM/STEM/EDS/EELS/EFTEM/NPGS: Thermo Fisher Tecnai TF-20 (80-300 kV)
  • TEM/STEM/EDS/HAADF: Thermo Fisher Tecnai TF-30 (80-200 kV)
Scanning Probe Microscopes =
  • Atomic Force Microscope (AFM): Bruker Dimension ICON
  • Profilometer: Veeco Dektak 3ST
Optical Microscopes
  • Fluorescent Microscope: Olympus Yadda-Yadda


Support Tools

Metrology
  • Spectroscopic Ellipsometry: Woolam M-2000
  • Thin Film Measurement: Filmetrics model F40
  • Profilometer: Veeco Dektak 3ST
Thermal Processing
  • Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)
  • Rapid Thermal Annealer: Jipelec Jetfirst 150
  • Rapid Thermal Processer: Modular Process Technology RTP-600S
Wafer Processing
  • Scriber-Breaker: Dynatex GST-150
  • Wafer Bonder: Suss Microtech model SB6L
Device Processing
  • Wedge-Wedge Wire Bonder: Westbond model 7476D-79
  • Electrical Probing Station:


Miscellaneous

  • Critical Point Dryer: Tousimis Automegasamdri 915B