Usage Rates
Overview of KNI Lab User Fees
Note: Rates below are valid beginning October 1, 2021 and are subject to change
- Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof)
- Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during calendar months of non-use
Caltech & JPL Usage Rates
Below is a table of hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2022 and are subject to change upon review at the end of FY23 Q2. Rates below apply to internal Caltech or JPL users.
| Equipment Name | Lab Area | Hourly Rate |
|---|---|---|
| General Lab | General KNI Lab Use* | $37.50 |
| Raith EBPG 5000+ Electron Beam Writer | Electron Beam Lithography (EBL) | $120 |
| Raith EBPG 5000+ Electron Beam Writer | Electron Beam Lithography (EBL) | $120 |
| Oxford Dielectric System 100 ICP/RIE | Etch, Reactive Ion (RIE) | $45 |
| Oxford DRIE System 100 ICP/RIE | Etch, Reactive Ion (RIE) | $45 |
| Oxford III-V System 100 ICP/RIE | Etch, Reactive Ion (RIE) | $45 |
| Plasmatherm Reactive Ion Etch | Etch, Reactive Ion (RIE) | $45 |
| Oxford FlexAl ALD/ALE System | Deposition, Chemical Vapor | $60 |
| Oxford PECVD System 100 | Deposition, Chemical Vapor | $60 |
| AJA Chalcogenide Sputterer | Deposition, Physical | $30 |
| AJA Dielectric Sputterer | Deposition, Physical | $30 |
| AJA E-beam Evaporator (estim. Dec arrival) | Deposition, Physical | $30 |
| CHA MK40 E-Beam Evaporator | Deposition, Physical | $30 |
| Lesker Labline E-Beam Evaporator | Deposition, Physical | $30 |
| FEI Nova 600 Dualbeam Focused Ion Beam | Microscopy, Focused Ion Beam (FIB) | $70 |
| Zeiss Orion NanoFab | Microscopy, Focused Ion Beam (FIB) | $70 |
| FEI Nova 200 NanoLab Dualbeam FIB/SEM | Microscopy, Scanning Electron (SEM) | $35 |
| FEI Quanta ESEM /NPGS | Microscopy, Scanning Electron (SEM) | $35 |
| FEI Sirion FESEM | Microscopy, Scanning Electron (SEM) | $35 |
| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF | Microscopy, Transmission Electron (TEM) | $130 |
| Nanoscribe Photonic Professional GT | 2D/3D Print | $15 |
| 3D Printer (TBA) | 2D/3D Print | $15 |
General Lab Use includes the use of: Atomic Force Microscope (AFM), Critical Point Dryer, Laser Interference Lithography System, Mask Aligners, Parylene Coater, Profilometer, Scriber/Breaker, Spectroscopic Ellipsometer, TEM prep area (in Keck), Tube Furnaces (Wet, Dry Oxide + Annealing), Wafer Bonder, Wafer Stepper, Wet Chemistry Room/general chemical supplies, Wire Bonder, and XeF2 Silicon Etcher, as well as other tools not listed in the Lab Areas above.
Miscellaneous Rates
- Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
- Dedicated KNI Staff Labor/Support for Research is $100/hr.
MONTHLY TIERED RATES
OVERHEAD FEE/INDIRECT COST- Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2023 is 70%, but actual charged overhead rate is dependent on the PTA used to pay KNI Lab fees.*
Corporate Memberships
For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.
| Lab Area | Tier A | Tier A Hourly Rate | Tier B | Tier B Hourly Rate | Tier C | Tier C Hourly Rate |
|---|---|---|---|---|---|---|
| Electron Beam Lithography (EBL) | Up to 24 hours | $120 | 24-48 hours | $60 | Over 48 hours | $0 |
| Etch, Reactive Ion (RIE) | Up to 15 hours | $45 | 15-30 hours | $22.50 | Over 30 hours | $0 |
| Deposition, Chemical Vapor | Up to 10 hours | $60 | 10-20 hours | $30 | Over 20 hours | $0 |
| Deposition, Physical | Up to 10 hours | $30 | 10-20 hours | $15 | Over 20 hours | $0 |
| Microscopy, Focused Ion Beam (FIB) | Up to 15 hours | $70 | 15-30 hours | $35 | Over 30 hours | $0 |
| Microscopy, Scanning Electron (SEM) | Up to 15 hours | $35 | 15-30 hours | $17.50 | Over 30 hours | $0 |
| Microscopy, Transmission Electron (TEM) | Up to 16 hours | $130 | 16-32 hours | $65 | Over 32 hours | $0 |
| 2D/3D Print | Up to 50 hours | $15 | 50-100 hours | $7.50 | Over 100 hours | $0 |
| General Lab Use | Up to 32 hours | $37.50 | 32-64 hours | $18.75 | Over 64 hours | $0 |