LabRunr Instructions

LabRunr Instrument Type Lithography Techniques Frontside Alignment, Backside Alignment, Flood exposure Staff Manager Alireza Ghaffari Staff Email ghaffari@caltech.edu Staff Phone 626-395-3984 Reserve time on FBS Request training via FBS User Dashboard Lab Location B217 Steele Lab Phone 626-395-1535 Manufacturer Suss MicroTec Model MA6 & MA6/BA6

Description

Used for scheduling and billing of Lab and System usage.

Resources

Equipment Data

• Lithography Pass-down equipment information

SOPs & Troubleshooting

• General SOP & Troubleshooting
• Lamp Change SOP
• Lamp Re-Ignition SOP
• Suss 1 Lamp Re-Ignition Video
• Suss 2 Lamp Re-Ignition Video

Optical Lithography Resources

• Optical Lithography Resources Page
• Laurell Spinner Cleaning SOP
• Laurell Spinner - Spinning Resist Video