LabRunr Instructions

LabRunr Instrument Type Lithography Techniques Frontside Alignment, Backside Alignment, Flood exposure Staff Manager Alireza Ghaffari Staff Email ghaffari@caltech.edu Staff Phone 626-395-3984 Reserve time on FBS Request training via FBS User Dashboard Lab Location B217 Steele Lab Phone 626-395-1535 Manufacturer Suss MicroTec Model MA6 & MA6/BA6

Description

LabRunr is a utility / web server / database manager used for the scheduling and billing of KNI tools and lab use time.

LabRunr allows KNI members to schedule and reserve equipment inside the lab and remotely with a web interface.

• LabRunr Reservations (LabRunr Web Interface)
• If unable to login or forgotten password, contact KNI administrator - Jennifer Palmer

LabRunr accurately documents lab and tool USE TIME for administration accounting.

• Always scan into LabRunr when entering the KNI lab room B207.
  • if your name does not appear on the LabRunr door monitor, notify a KNI staff member.
• START your session inside the lab before using the tool.
• STOP your session when you are finished using the tool.
• If you forget to STOP your session or forget to START/STOP your session, contact the tool manager to update the system records. Email the tool manager and include the Date, Start, and STOP time for the tool being used.

Resources

Equipment Data

• Lithography Pass-down equipment information

SOPs & Troubleshooting

• General SOP & Troubleshooting
• Lamp Change SOP
• Lamp Re-Ignition SOP
• Suss 1 Lamp Re-Ignition Video
• Suss 2 Lamp Re-Ignition Video

Optical Lithography Resources

• Optical Lithography Resources Page
• Laurell Spinner Cleaning SOP
• Laurell Spinner - Spinning Resist Video