Usage Rates

The rates below are valid beginning October 2018 and are subject to change.

NOTE:

• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A ("overhead") fees.
• Individual Tools listed below are charged by the hour or portion thereof.
• Precious Metal Usage (e.g. gold, platinum) is billed by the gram or portion thereof. The market prices per gram are passed on to users and do not include Caltech overhead.

Equipment Rates

Name	Category	Caltech Rate	JPL/Non-Caltech Acad/Govt Rate	Corporate Rate**
Electron Beam Pattern Generators (100kV)	Lithography	$62.00	$101.99	$152.99
Two-Photon Lithography ("Microscale 3D Printing")	Lithography	$8.00	$13.16	$19.74
Direct-Write Laser System (DWL-66)	Lithography	$47.00	$77.32	$115.97
Contact Mask Aligners	Lithography	$36.00	$59.22	$88.83
He/Ne/Ga-FIB w/ Multibeam Pattern Generator (Orion)	Lithography/Microscopy	$65.00	$106.93	$160.39
SEM Nanometer Pattern Generation System (Quanta)	Lithography/Microscopy	$39.00	$64.16	$96.23
Etcher: III/V Material, Metal & Silicon	Etching	$50.00	$82.25	$123.38
Etcher: Silicon (DRIE)	Etching	$50.00	$82.25	$123.38
Etcher: Dielectric Material ("380")	Etching	$50.00	$82.25	$123.38
Etcher: Silicon, III/V Material & Organics (RIE)	Etching	$50.00	$82.25	$123.38
Etcher: XeF2 for Silicon	Etching	$50.00	$82.25	$123.38
Plasma-Enhanced Chemical Vapor Deposition	Deposition	$67.00	$110.22	$165.32
Atomic Layer Deposition	Deposition	$67.00	$110.22	$165.32
E-beam Evaporator: Metals and Oxides (CHA)	Deposition	$24.00	$39.48	$59.22
E-beam Evaporator: Metals Al, Au, Pt & Ti (Lesker Labline)	Deposition	$24.00	$39.48	$59.22
Chalcogenide Sputter	Deposition	$70.00	$115.15	$172.73
Dielectric Sputter	Deposition	$37.00	$60.87	$91.30
SEM, EDS & WDS (Nova 200)	Microscopy	$65.00	$106.93	$160.39
SEM, Ga-FIB, GIS & Omniprobe (Nova 600)	Microscopy	$65.00	$106.93	$160.39
SEM & EDS (Sirion)	Microscopy	$39.00	$64.16	$96.23
Atomic Force Microscope	Microscopy	$41.00	$67.45	$101.17
TEM, STEM, EDS & HAADF: TF-30 (80-300 kV)	Microscopy	$97.00	$159.57	$239.35
Critical Point Dryer	Support Tools	$54.00	$88.83	$133.25
Tube Furnaces	Support Tools	$5.00	$8.23	$12.34
Monthly Base Rate*	General Equipment*	$655.00	$1,077.48	$1,616.21

*Monthly Base Rate

The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:

Profilometers, Chemical Wet Benches, Dynatex GST-150 Scriber Breaker, J.A. Woolam Spectroscopic Ellipsometer M-2000, TF20 TEM, GCA 6300 Stepper, Rapid Thermal Processor, Paratech Parylene Coater, Suss SB6L Wafer Bonder, Westbond Wire Bonder, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (gowning, chemicals, equipment reservation software, etc.).

**Corporate Memberships

For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding: the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.