Usage Rates

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2024 and are subject to change

• Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
• Lab users do NOT incur lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access is granted.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Rates shown below do not include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.

Rates below apply to internal Caltech or JPL users.

Equipment Name	Lab Area	Hourly Rate
General Lab	General KNI Lab Use*	$40
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Oxford FlexAl ALD/ALE System	Deposition, Chemical Vapor	$65
FEI Nova 600 Dualbeam Focused Ion Beam	Microscopy, Focused Ion Beam (FIB)	$73
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF	Microscopy, Transmission Electron (TEM)	$140		Au, Pt	Precious Metals	MP

General Lab Use is counted as time in the KNI cleanroom facility. It includes access to: - Atomic Force Microscope - Critical Point Dryer - Electron Beam Evaporators - Laser Interference Lithography System - Mask Aligners - Nanoscribe PPGT - Parylene Coater - PECVD - Profilometer - Rapid Thermal Processor - Reactive Ion Etchers (Oxford III-V, Dielectric, 380) - Scanning Electron Microscopes (Quanta, Sirion) - Scriber Breaker - Spectroscopic Ellipsometer - Tube Furnaces (Wet, Dry Oxide + Annealing) - Wafer Bonder - Wafer Stepper - Wet Chemistry Room/general supplies - Wire Bonder - XeF2 Silicon Etcher - Other tools not listed in the table above

Miscellaneous Rates

• Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
• Staff-approved full service work is $100/hr.

MONTHLY TIERED RATES Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.

Lab Area	Tier A	Tier A Hourly Rate	Tier B	Tier B Hourly Rate
General Lab Use	Up to 40 hours	$40	Over 40 hours	$20
Deposition, Chemical Vapor (ALD/ALE)	Up to 30 hours	$65	Over 30 hours	$32.50
Electron Beam Lithography (EBL)	Up to 30 hours	$120	Over 30 hours	$60
Microscopy, Focused Ion Beam (FIB)	Up to 20 hours	$73	Over 20 hours	$36.50
Microscopy, Transmission Electron (TEM)	All hours	$140	NA

Example: A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 30 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are: (15 non-billable hours x $0) + (30 EBL hours @ full rate x 10 EBL hours @ discounted rate) + (10 hours of general lab time) The lab member's total October direct costs are $4,600.

OVERHEAD/INDIRECT COST RATE

• The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%.

Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.

External/Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.