Process Recipe Library: Difference between revisions
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===== Dry Etching ===== | ===== Dry Etching ===== | ||
* [https://caltech.box.com/s/3b9zbdj1uoazz7zbz8png25c2ba65vas Comparison of etch rates using different sample-fixing oils] | * [https://caltech.box.com/s/3b9zbdj1uoazz7zbz8png25c2ba65vas Comparison of etch rates using different sample-fixing oils] | ||
* [https://caltech.box.com/s/vbjlzmbprhw1sg3auoz1oso5clwrme87 In-situ (dielectric sputter) RF plasma etch of thermal SiO2] | |||
===== Wet Etching ===== | ===== Wet Etching ===== | ||
* [https://caltech.box.com/s/ob0wosa8tp79xo3wa3taxbjy24kya6qs HF etching of SiO2 deposited via wet thermal oxidation] | * [https://caltech.box.com/s/ob0wosa8tp79xo3wa3taxbjy24kya6qs HF etching of SiO2 deposited via wet thermal oxidation] | ||
Revision as of 19:21, 4 February 2020
You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:
- All Content (requires login with a caltech.edu email address)
- Publicly available content (no login required)
Lithography Process Recipes
Electron Beam Lithography
- ZEP 520A Resist: Procedure for spinning, writing & development (Caltech-only access)
- HSQ Resist: Procedure for spinning, writing & development (Caltech-only access)
- Performing Aligned EBL Patterning Steps with NPGS on an SEM | Alignment Template Files
Helium Ion Beam Lithography
Optical Lithography
Deposition Process Recipes
Sputtering
- SnO2 sputtering recipe
- NbOx sputtering recipe
- TiO2 sputtering recipe
- Aluminum Nitride sputtering recipe
- Al2O3 sputtering recipe
- Guide to maintaining a plasma using gradual pressure changes
Chemical Vapor Deposition (CVD)
Etching Process Recipes
Dry Etching
- Comparison of etch rates using different sample-fixing oils
- In-situ (dielectric sputter) RF plasma etch of thermal SiO2
Wet Etching
Microscopy Process Recipes
Focused Ion Beam (FIB) Systems
- Cutting & Imaging Cross-sections with SEM/Ga-FIB
- Preparing TEM Lamella Samples with SEM/Ga-FIB
- Helium Ion Beam Lithography (HIBL) – Parameter Guide
- Helium Ion Beam Imaging with the Electron Flood Gun – Parameter Guide
- Source Rebuild Guide for ORION NanoFab He- & Ne-FIB
Scanning Electron Microscopes (SEMs)
- Environmental SEM (ESEM) Imaging Guide (for biological and highly non-conductive specimens)
- Performing Aligned EBL Patterning Steps with NPGS on an SEM | Alignment Template Files