Usage Rates

The rates below are valid beginning October 2018 and are subject to change.

NOTE:

• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A ("overhead") fees.
• Individual Tools listed below are charged by the hour or portion thereof.
• Precious Metal Usage (e.g. gold, platinum) is billed by the gram or portion thereof. The market prices per gram are passed on to users and do not include Caltech overhead.

Equipment Rates

Name	Caltech Rate	JPL/Non-Caltech Acad/Govt Rate	Corporate Rate**
EBPG 5000+	{{{EquipmentCategory}}}	$62.00	$101.99	$152.99
EBPG 5200	{{{EquipmentCategory}}}	$62.00	$101.99	$152.99
ORION NanoFab	{{{EquipmentCategory}}}	$65.00	$106.93	$160.39
Nova 200 Dual Beam	{{{EquipmentCategory}}}	$65.00	$106.93	$160.39
Nova 600 Dual Beam	{{{EquipmentCategory}}}	$65.00	$106.93	$160.39
Sirion FESEM	{{{EquipmentCategory}}}	$39.00	$64.16	$96.23
Quanta ESEM	{{{EquipmentCategory}}}	$39.00	$64.16	$96.23
AFM	{{{EquipmentCategory}}}	$41.00	$67.45	$101.17
III-V/Metal Etcher	{{{EquipmentCategory}}}	$50.00	$82.25	$123.38
DRIE Silicon Etcher	{{{EquipmentCategory}}}	$50.00	$82.25	$123.38
"380" Dielectric Material Etcher	{{{EquipmentCategory}}}	$50.00	$82.25	$123.38
PECVD	{{{EquipmentCategory}}}	$67.00	$110.22	$165.32
ALD	{{{EquipmentCategory}}}	$67.00	$110.22	$165.32
Plasmatherm RIE	{{{EquipmentCategory}}}	$50.00	$82.25	$123.38
XeF2 Etcher	{{{EquipmentCategory}}}	$50.00	$82.25	$123.38
CHA E-beam Evaporator	{{{EquipmentCategory}}}	$24.00	$39.48	$59.22
Lesker Labline E-beam Evaporator	{{{EquipmentCategory}}}	$24.00	$39.48	$59.22
Chalcogenide Sputter	{{{EquipmentCategory}}}	$70.00	$115.15	$172.73
Dielectric Sputter	{{{EquipmentCategory}}}	$37.00	$60.87	$91.30
Nanoscribe PPGT	{{{EquipmentCategory}}}	$8.00	$13.16	$19.74
Direct-Write Laser System DWL-66	{{{EquipmentCategory}}}	$47.00	$77.32	$115.97
Tousimis Critical Point Dryer	{{{EquipmentCategory}}}	$54.00	$88.83	$133.25
Suss Mask Aligners	{{{EquipmentCategory}}}	$36.00	$59.22	$88.83
Tube Furnaces	{{{EquipmentCategory}}}	$5.00	$8.23	$12.34
TF-30 UT TEM	{{{EquipmentCategory}}}	$97.00	$159.57	$239.35
Monthly Base Rate*	{{{EquipmentCategory}}}	$655.00	$1,077.48	$1,616.21

*Monthly Base Rate

The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:

Profilometers, Chemical Wet Benches, Dynatex GST-150 Scriber Breaker, Tecnai TF20 TEM, GCA 6300 Stepper, Rapid Thermal Processor, Paratech Parylene Coater, Suss SB6L Wafer Bonder, Westbond Wire Bonder, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (gowning, chemicals, equipment reservation software, etc.).

**Corporate Memberships

For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding: the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.