Usage Rates

Equipment Hourly Rates

Equipment Name	Caltech Rate	JPL/Non-Caltech Acad/Govt Rate	Corporate Rate
Chalcogenide Sputter	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Dielectric Sputter	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
EBPG 5000+	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
EBPG 5200	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
ORION NanoFab	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Nanoscribe PPGT	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Nova 200 Dual Beam	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Nova 600 Dual Beam	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Sirion FESEM	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Quanta ESEM	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
III-V/Metal Etcher	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
DRIE	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
380	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
PECVD	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Plasmatherm RIE	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
XeF2 Etcher	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
CHA E-beam Evaporator	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Lesker E-beam Evaporator	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
DWL-66	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Tousimis CPD	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
AFM	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Mask Aligners	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
Tystar Tube Furnaces	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00
TF-30 UT TEM	{{{EquipmentCategory}}}	$0.00	$0.00	$0.00