Process Recipe Library

You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories:

1. All Content (requires login with a caltech.edu email address)
2. Publicly available content (no login required)

Lithography Process Recipes

Electron Beam Lithography

• ZEP 520A resist spinning procedure (Caltech-only access)

Optical Lithography

• AZ5214 resist spinning recipe
• S1813 resist spinning recipe

Deposition Process Recipes

Sputtering

• TiO₂ sputtering recipe
• Guide to maintaining a plasma using gradual pressure changes

Chemical Vapor Deposition (CVD)

• PECVD amorphous Si recipe

Etching Process Recipes

Dry Etching

• Comparison of etch rates using different sample-fixing oils

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems

• Cutting & Imaging Cross-sections with SEM/Ga-FIB
• Preparing TEM Lamella Samples with SEM/Ga-FIB
• Source rebuild guide for ORION NanoFab He- & Ne-FIB

Scanning Electron Microscopes (SEMs)

• Environmental SEM (ESEM) Imaging Guide (for biological and highly non-conductive specimens)

Transmission Electron Microscopes (TEMs)

• STEM mode EDS on TF-20 TEM (emphasis on high-resolution 2D mapping)