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'''Overview of KNI Lab User Fees''' <br>
'''Overview of KNI Lab User Fees''' <br>
''Rates below are valid beginning October 1, 2023 and are subject to change''
''Rates below are valid beginning October 1, 2024 and are subject to change''


* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during days or months of non-use
* Lab users do '''NOT''' incur lab fees during days or months of non-use


'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access or further tool training is allowed.'''
'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access is granted.'''


== Caltech & JPL Usage Rates ==
== Caltech & JPL Usage Rates ==
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include any applicable indirect charges, such as F&A/overhead. Overhead will be applied separately based on the PTA being charged. Customers will be invoiced on a monthly basis. Rates are valid beginning October 1, 2023 and are subject to change.
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do '''not''' include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.  
Rates below apply to internal Caltech or JPL users.


{| class="wikitable" style="width: 80%;"
{| class="wikitable" style="width: 90%;"
|-
|-
!scope="col" style="text-align:left; width: 50%"| Equipment Name
!scope="col" style="text-align:left; width: 30%"| Equipment Name
!scope="col" style="text-align:center; width: 35%"| Lab Area
!scope="col" style="text-align:center; width: 22%"| Lab Area
!scope="col" style="text-align:center; width: 15%" | Hourly Rate
!scope="col" style="text-align:center; width: 12%" | Tier A Rate
!scope="col" style="text-align:center; width: 12%"| Tier A
!scope="col" style="text-align:center; width: 12%"| Tier B Rate
!scope="col" style="text-align:center; width: 12%" | Tier B
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab  
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $40/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 40 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $20/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 40 hours/month
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ and 5200 Electron Beam Writers
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120/hr
|-
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60/hr
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $48
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $48
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $48
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $48
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65/hr
|-
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $32.50/hr
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Chalcogenide Sputterer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Dielectric Sputterer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA E-beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Atomic Force Microscope
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Atomic Force (AFM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73/hr
|-
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 20 hours/month
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $36.50/hr
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam SEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $140
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $140/hr
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $12
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 3D Printer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $12
|}
|}


'''General Lab Use is counted as time in the KNI cleanroom facility. It includes access to:'''  
'''General Lab use is counted as time in the KNI cleanroom facility. It includes access to:'''  
- Critical Point Dryer
*Atomic Force Microscope
- Laser Interference Lithography System
*Critical Point Dryer
- Mask Aligners
*Electron Beam Evaporators
- Parylene Coater
*Laser Interference Lithography System
- Profilometer
*Mask Aligners
- Scriber Breaker
*Nanoscribe PPGT
- Spectroscopic Ellipsometer
*Parylene Coater
- Tube Furnaces (Wet, Dry Oxide + Annealing)
*PECVD
- Wafer Bonder
*Profilometer
- Wafer Stepper
*Rapid Thermal Processor
- Wet Chemistry Room/general chemical supplies
*Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
- Wire Bonder
*Scanning Electron Microscopes (Quanta, Sirion)
- XeF2 Silicon Etcher
*Scriber Breaker
- TEM prep area (in Keck)
*Spectroscopic Ellipsometer
- Other tools not listed in the table above
*Tube Furnaces (Wet, Dry Oxide + Annealing)
*Wafer Bonder
*Wafer Stepper
*Wet Chemistry Room/general supplies
*Wire Bonder
*XeF2 Silicon Etcher
*Other tools not listed in the table above


'''Miscellaneous Rates'''
'''Miscellaneous Rates'''
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
*Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.
*Staff-approved full service work is $100/hr.
 
'''Example of Charges'''


'''MONTHLY TIERED RATES'''
A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:
Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.


{| class="wikitable" style="width: 90%;"
(15 non-billable hours x $0/hr) + (30 combined EBL hours @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)  
|-
!scope="col" style="text-align:left; width: 28%"| Lab Area
!scope="col" style="text-align:center; width: 12%"| Tier A
!scope="col" style="text-align:center; width: 12%" | Tier A Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier B
!scope="col" style="text-align:center; width: 12%" | Tier B Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier C
!scope="col" style="text-align:center; width: 12%" | Tier C Hourly Rate
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 24-48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $48
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 16-32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $24
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 24-48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $32.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 16-32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $17.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Atomic Force (AFM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 8 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 8-16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $7.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 12 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 12-24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $36.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 12 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 12-24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $18.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $130
!scope="col" style="text-align:center; background-color:#FFFFFF;"| NA
!scope="col" style="text-align:center; background-color:#FFFFFF;"|
!scope="col" style="text-align:center; background-color:#FFFFFF;"| NA
!scope="col" style="text-align:center; background-color:#FFFFFF;"|
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 64 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $12
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 64-128 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $6
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 128 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab Use
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 32-64 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $17.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 64 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|}


'''Example:'''
The lab member's total October direct costs are $4,600.
A lab member logs 35 cumulative hours on the Lesker e-beam evaporator and the AJA dielectric sputterer in the month of October. Based on the
thresholds listed above for the "Physical Deposition" Area (which includes the Lesker and AJA tools), the costs are:
(16 hours x $35) + (16 hours x $17.50) + (3 hours x $0) = $840 for 35 hours.
During that same calendar month, the same user logs 60 total hours in the general KNI lab facility and 5 hours on the spectroscopic ellipsometer,
which is included in the "General Lab" Area. Those costs are:
(32 hours x $35) + (28 hours x $17.50) = $1,610 for 60 hours.
The lab member's total October direct costs are $2,450.


==OVERHEAD/INDIRECT COST RATE==
==Overhead/Indirect Cost Rate==
*Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2024 is 70%.  
The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%.  
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.


==External/Corporate Memberships==
==External/Corporate Memberships==


For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and each step must be completed before an external user is able to start in the KNI Lab.
The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.  
'''Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment.''' This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.

Latest revision as of 18:05, 16 January 2025

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2024 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
  • Lab users do NOT incur lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access is granted.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do not include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.

Equipment Name Lab Area Tier A Rate Tier A Tier B Rate Tier B
General Lab General KNI Lab Use* $40/hr Up to 40 hours/month $20/hr Over 40 hours/month
Raith EBPG 5000+ and 5200 Electron Beam Writers Electron Beam Lithography (EBL) $120/hr Up to 30 hours/month $60/hr Over 30 hours/month
Oxford FlexAl ALD/ALE System Deposition, Chemical Vapor $65/hr Up to 30 hours/month $32.50/hr Over 30 hours/month
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy, Focused Ion Beam (FIB) $73/hr Up to 20 hours/month $36.50/hr Over 20 hours/month
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy, Transmission Electron (TEM) $140/hr

General Lab use is counted as time in the KNI cleanroom facility. It includes access to:

  • Atomic Force Microscope
  • Critical Point Dryer
  • Electron Beam Evaporators
  • Laser Interference Lithography System
  • Mask Aligners
  • Nanoscribe PPGT
  • Parylene Coater
  • PECVD
  • Profilometer
  • Rapid Thermal Processor
  • Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
  • Scanning Electron Microscopes (Quanta, Sirion)
  • Scriber Breaker
  • Spectroscopic Ellipsometer
  • Tube Furnaces (Wet, Dry Oxide + Annealing)
  • Wafer Bonder
  • Wafer Stepper
  • Wet Chemistry Room/general supplies
  • Wire Bonder
  • XeF2 Silicon Etcher
  • Other tools not listed in the table above

Miscellaneous Rates

  • Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
  • Staff-approved full service work is $100/hr.

Example of Charges

A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:

(15 non-billable hours x $0/hr) + (30 combined EBL hours @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)

The lab member's total October direct costs are $4,600.

Overhead/Indirect Cost Rate

The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%. Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.

External/Corporate Memberships

The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.